Theoretical study on protected unit fluctuation of chemically amplified resists used for photomask production by electron beam lithography
1998 ◽
Vol 41-42
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pp. 183-186
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2003 ◽
Vol 21
(6)
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pp. 3149
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2016 ◽
Vol 55
(5)
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pp. 056503
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2016 ◽
Vol 55
(10)
◽
pp. 106502
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2002 ◽
Vol 20
(4)
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pp. 1303
◽
1998 ◽
Vol 37
(Part 1, No. 12B)
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pp. 6761-6766
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2015 ◽
Vol 54
(9)
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pp. 096501
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