Characterization of In20Ge15Sb10Te55Phase Change Material for Phase Change Memory with Low Power Operation and Good Data Retention

2012 ◽  
Vol 51 (3R) ◽  
pp. 031201
Author(s):  
Takahiro Morikawa ◽  
Kenzo Kurotsuchi ◽  
Yoshihisa Fujisaki ◽  
Yuichi Matsui ◽  
Norikatsu Takaura
2012 ◽  
Vol 51 ◽  
pp. 031201 ◽  
Author(s):  
Takahiro Morikawa ◽  
Kenzo Kurotsuchi ◽  
Yoshihisa Fujisaki ◽  
Yuichi Matsui ◽  
Norikatsu Takaura

2009 ◽  
Vol 2 (9) ◽  
pp. 091401 ◽  
Author(s):  
Xilin Zhou ◽  
Liangcai Wu ◽  
Zhitang Song ◽  
Feng Rao ◽  
Bo Liu ◽  
...  

2010 ◽  
Vol 97 (8) ◽  
pp. 083504 ◽  
Author(s):  
Hao Zhu ◽  
Jiang Yin ◽  
Yidong Xia ◽  
Zhiguo Liu

Author(s):  
B. Gleixner ◽  
A. Pirovano ◽  
J. Sarkar ◽  
F. Ottogalli ◽  
E. Tortorelli ◽  
...  

2017 ◽  
Vol 898 ◽  
pp. 1834-1838
Author(s):  
Tao Li ◽  
Liang Cai Wu ◽  
Zhi Tang Song ◽  
San Nian Song ◽  
Feng Rao ◽  
...  

Carbon-doped Sb-rich Ge-Sb-Te (Sb-CGST) is proved to be a promising candidate for phase change memory because of it high crystallization temperature (higher than 200°C) and 10-year data retention temperature (higher than 120°C). The carbon-doped Sb-rich Ge-Sb-Te (Sb-CGST) films were deposited on SiO2/Si (100) substrate by RF magnetron co-sputtering using CGST alloy target (a GST target containing 16 at. % C) and Sb targets at room temperature. The content of Sb in the films was controlled by adjusting the sputtering power ratio of CGST and Sb. The results showed that both of these two properties increase firstly and then decreases with increasing the content of Sb, which are superior to that of Ge2Sb2Te5. Furthermore, Sb-CGST based PCM cells were fabricated to investigate the property of material. 6ns pulse could realize SET operation, and 3.2 x 10-11J energy can realize RESET operation.


2014 ◽  
Vol 116 (7) ◽  
pp. 074304 ◽  
Author(s):  
Zhonghua Zhang ◽  
Yifeng Gu ◽  
Sannian Song ◽  
Zhitang Song ◽  
Yan Cheng ◽  
...  

2006 ◽  
Vol 36 (1) ◽  
pp. 88-91 ◽  
Author(s):  
Baowei Qiao ◽  
Jie Feng ◽  
Yunfeng Lai ◽  
Yanfei Cai ◽  
Yinyin Lin ◽  
...  

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