Deposition of Silicon Nitride Films by High Rate Reactive Sputtering

1979 ◽  
Author(s):  
Y. Hoshi ◽  
M. Naoe ◽  
S. Yamanaka
Keyword(s):  
Silicon Nitride ◽  
Reactive Sputtering ◽  
High Rate ◽  
Silicon Nitride Films

Deposition of Silicon Nitride Films by High Rate Reactive Sputtering

1980 ◽  
Vol 19 (S1) ◽  
pp. 71
Author(s):  
Youichi Hoshi ◽  
Masahiko Naoe ◽  
Shun-ichi Yamanaka
Keyword(s):  
Silicon Nitride ◽  
Reactive Sputtering ◽  
High Rate ◽  
Silicon Nitride Films

Bulk passivation of multicrystalline silicon solar cells induced by high-rate-deposited (> 1 nm/s) silicon nitride films

2003 ◽  
Vol 11 (2) ◽  
pp. 125-130 ◽  
Author(s):  
J. Hong ◽  
W. M. M. Kessels ◽  
F. J. H. van Assche ◽  
H. C. Rieffe ◽  
W. J. Soppe ◽  
...  
Keyword(s):  
Solar Cells ◽  
Silicon Nitride ◽  
High Rate ◽  
Multicrystalline Silicon ◽  
Silicon Solar Cells ◽  
Silicon Nitride Films ◽  
Bulk Passivation

High rate (∼3 nm/s) deposition of dense silicon nitride films at low substrate temperatures (<150 °C) using the expanding thermal plasma and substrate biasing

2005 ◽  
Vol 484 (1-2) ◽  
pp. 46-53 ◽  
Author(s):  
F.J.H. van Assche ◽  
W.M.M. Kessels ◽  
R. Vangheluwe ◽  
W.S. Mischke ◽  
M. Evers ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Thermal Plasma ◽  
High Rate ◽  
Silicon Nitride Films ◽  
Substrate Temperatures ◽  
S Deposition

Photoluminescence in Non-Stoichiometric Silicon Nitride Films Obtained by Reactive Sputtering

2019 ◽  
Vol 39 (1) ◽  
pp. 315-320 ◽  
Author(s):  
Guilherme Sombrio ◽  
Antônio Eudócio P. De Mattos ◽  
Paulo L. Franzen ◽  
Marcelo B. Pereira ◽  
Henri I. Boudinov
Keyword(s):  
Silicon Nitride ◽  
Reactive Sputtering ◽  
Silicon Nitride Films
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