Structure and Properties of Silicon Titanium Oxide Films Prepared by Plasma CVD Method

1991 ◽  
Author(s):  
Takeshi KAMADA ◽  
Masatoshi KITAGAWA ◽  
Munehiro SHIBUYA ◽  
Takashi HIRAO
2001 ◽  
Vol 40 (Part 2, No. 10A) ◽  
pp. L1054-L1057 ◽  
Author(s):  
Yo Ichikawa ◽  
Kentaro Setsune ◽  
Syun-ichiro Kawashima ◽  
Koichi Kugimiya

1997 ◽  
Vol 310 (1-2) ◽  
pp. 29-33 ◽  
Author(s):  
Feng Zhang ◽  
S. Jin ◽  
Yingjun Mao ◽  
Zhihong Zheng ◽  
Yu Chen ◽  
...  

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