Structure and Properties of Silicon Titanium Oxide Films Prepared by Plasma CVD Method
Keyword(s):
2003 ◽
Vol 166
(2-3)
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pp. 176-182
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Keyword(s):
1991 ◽
Vol 30
(Part 1, No. 12B)
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pp. 3594-3596
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1995 ◽
Vol 29
(11)
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pp. 1459-1468
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Keyword(s):
2001 ◽
Vol 40
(Part 2, No. 10A)
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pp. L1054-L1057
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