Silicon Nitride Film for High-Mobility Thin-Film Transistor by Hybrid-Excitation Chemical Vapor Deposition
1993 ◽
Vol 32
(Part 1, No. 1B)
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pp. 462-468
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Keyword(s):
1995 ◽
Vol 34
(Part 1, No. 9A)
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pp. 4736-4740
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2015 ◽
Vol 54
(8S1)
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pp. 08KD12
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Keyword(s):
2009 ◽
Vol 15
(5)
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pp. 881-885
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Keyword(s):
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 2B)
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pp. 1509-1512
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Keyword(s):
2011 ◽
Vol 38
(9)
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pp. 11437-11441
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