Improvement of electrical properties for high-κ dielectrics grown by MOCVD via cyclic remote plasma oxidation
2016 ◽
Vol 8
(29)
◽
pp. 19119-19126
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Keyword(s):
2018 ◽
Vol 51
(13)
◽
pp. 135201
◽
Keyword(s):
Keyword(s):
2003 ◽
Vol 42
(Part 2, No. 12A)
◽
pp. L1472-L1474
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2019 ◽
Vol 58
(SE)
◽
pp. SEEC02
◽
Keyword(s):
2008 ◽
Vol 52
(4)
◽
pp. 1103-1108
◽
Keyword(s):