remote plasma oxidation
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Impact of remote plasma oxidation of a GaN surface on photoluminescence properties

2019 ◽  
Vol 58 (SE) ◽  
pp. SEEC02 ◽  
Author(s):  
Noriharu Takada ◽  
Noriyuki Taoka ◽  
Taishi Yamamoto ◽  
Akio Ohta ◽  
Nguyen Xuan Truyen ◽  
...  
Keyword(s):  
Plasma Oxidation ◽  
Photoluminescence Properties ◽  
Remote Plasma ◽  
Remote Plasma Oxidation

Remote Plasma Oxidation and Atomic Layer Etching of MoS2

2016 ◽  
Vol 8 (29) ◽  
pp. 19119-19126 ◽  
Author(s):  
Hui Zhu ◽  
Xiaoye Qin ◽  
Lanxia Cheng ◽  
Angelica Azcatl ◽  
Jiyoung Kim ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Remote Plasma Oxidation ◽  
Atomic Layer Etching

Atomic Layer Deposition of HfO2 Thin Films on Ultrathin SiO2 Formed by Remote Plasma Oxidation

2008 ◽  
Vol 52 (4) ◽  
pp. 1103-1108 ◽  
Author(s):  
Seokhoon Kim ◽  
Sanghyun Woo ◽  
Hyungchul Kim ◽  
Inhoe Kim ◽  
Keunwoo Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Layer Deposition ◽  
Remote Plasma Oxidation

Low-resistance magnetic tunnel junctions prepared by partial remote plasma oxidation of 0.9nm Al barriers

2005 ◽  
Vol 86 (19) ◽  
pp. 192502 ◽  
Author(s):  
Ricardo Ferreira ◽  
Paulo P. Freitas ◽  
Maureen MacKenzie ◽  
John N. Chapman
Keyword(s):  
Tunnel Junctions ◽  
Magnetic Tunnel Junctions ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Low Resistance ◽  
Remote Plasma Oxidation

Electrical and physical properties of HfO2 films prepared by remote plasma oxidation of Hf metal

2003 ◽  
Vol 83 (11) ◽  
pp. 2229-2231 ◽  
Author(s):  
Kazuhiko Yamamoto ◽  
Shigenori Hayashi ◽  
Masaaki Niwa ◽  
Masayuki Asai ◽  
Sadayoshi Horii ◽  
...  
Keyword(s):  
Physical Properties ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Remote Plasma Oxidation

Improvement of electrical properties for high-κ dielectrics grown by MOCVD via cyclic remote plasma oxidation

2002 ◽  
Author(s):  
Sadayoshi Horii ◽  
Masayuki Asai ◽  
Hironobu Miya ◽  
Kazuhiko Yamamoto ◽  
Masaaki Niwa
Keyword(s):  
Electrical Properties ◽  
Plasma Oxidation ◽  
Remote Plasma ◽  
Remote Plasma Oxidation
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