Quantum Chemical Molecular Dynamics Simulation on Si Thin-film Crystal Growth for Solar Cells

2011 ◽  
Author(s):  
T. Kuwahara ◽  
Y. Higuchi ◽  
N. Ozawa ◽  
T. Shimazaki ◽  
M. Kubo
Keyword(s):  
Thin Film ◽  
Molecular Dynamics ◽  
Solar Cells ◽  
Crystal Growth ◽  
Molecular Dynamics Simulation ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics ◽  
Si Thin Film

Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 1859-1864 ◽  
Author(s):  
Katsumi Sasata ◽  
Toshiyuki Yokosuka ◽  
Hitoshi Kurokawa ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Plasma Etching ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics

Quantum Chemical Molecular Dynamics Simulation on the Plasma Etching Processes

2002 ◽  
Author(s):  
Katsumi Sasata ◽  
Toshiyuki Yokosuka ◽  
Hitoshi Kurokawa ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Plasma Etching ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics
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