Quantum Chemical Molecular Dynamics Simulation of GaN Etching Processes by Cl Radical

2012 ◽  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Gan Etching ◽  
Quantum Chemical Molecular Dynamics

Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 1859-1864 ◽  
Author(s):  
Katsumi Sasata ◽  
Toshiyuki Yokosuka ◽  
Hitoshi Kurokawa ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Plasma Etching ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics

Quantum Chemical Molecular Dynamics Simulation on the Plasma Etching Processes

2002 ◽  
Author(s):  
Katsumi Sasata ◽  
Toshiyuki Yokosuka ◽  
Hitoshi Kurokawa ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Plasma Etching ◽  
Quantum Chemical ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics

Ring Opening of Methylenecyclopropane over Lanthanocene Catalyst:  A Quantum-Chemical Molecular Dynamics Simulation Study

2003 ◽  
Vol 22 (11) ◽  
pp. 2181-2183 ◽  
Author(s):  
Yi Luo ◽  
Parasuraman Selvam ◽  
Yuki Ito ◽  
Seiichi Takami ◽  
Momoji Kubo ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Simulation Study ◽  
Quantum Chemical ◽  
Ring Opening ◽  
Dynamics Simulation ◽  
Quantum Chemical Molecular Dynamics
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