Damage-free Neutral Beam Etching for High-performance GaN HEMT

Mapping Intimacies ◽

10.7567/ssdm.2012.f-9-5 ◽

2012 ◽

Author(s):

Y. Tamura ◽

J. Ohta ◽

H. Fujioka ◽

S. Samukawa

Keyword(s):

High Performance ◽

Neutral Beam ◽

Gan Hemt ◽

Neutral Beam Etching

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Photoluminescence of high-density and sub-20-nm GaAs nanodisks fabricated with a neutral beam etching process and MOVPE regrowth for high performance QDs devices

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) ◽

10.1109/nano.2013.6720889 ◽

2013 ◽

Author(s):

Yosuke Tamura ◽

Akio Higo ◽

Takayuki Kiba ◽

Wang Yunpeng ◽

Makoto Igarashi ◽

...

Keyword(s):

High Performance ◽

High Density ◽

Etching Process ◽

Neutral Beam ◽

20 Nm ◽

Neutral Beam Etching

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High-density and sub-20-nm GaAs nanodisk array fabricated using neutral beam etching process for high performance QDs devices

2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO) ◽

10.1109/nano.2012.6321974 ◽

2012 ◽

Author(s):

Yosuke Tamura ◽

Makoto Igarashi ◽

Mohd Erman Fauzi ◽

Rikako Tsukamoto ◽

Toshiyuki Kaizu ◽

...

Keyword(s):

High Performance ◽

High Density ◽

Etching Process ◽

Neutral Beam ◽

20 Nm ◽

Neutral Beam Etching

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High-performance and damage-free neutral beam etching

7th International Symposium on Plasma- and Process-Induced Damage ◽

10.1109/ppid.2002.1042625 ◽

2003 ◽

Author(s):

S. Samukawa ◽

K. Sakamoto ◽

K. Ichiki

Keyword(s):

High Performance ◽

Neutral Beam ◽

Neutral Beam Etching

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High-Performance Three-Terminal Fin Field-Effect Transistors Fabricated by a Combination of Damage-Free Neutral-Beam Etching and Neutral-Beam Oxidation

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.04dc17 ◽

2010 ◽

Vol 49 (4) ◽

pp. 04DC17 ◽

Author(s):

Akira Wada ◽

Keisuke Sano ◽

Masahiro Yonemoto ◽

Kazuhiko Endo ◽

Takashi Matsukawa ◽

...

Keyword(s):

Field Effect ◽

High Performance ◽

Field Effect Transistors ◽

Neutral Beam ◽

Neutral Beam Etching

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High Performance GaN HEMT and Ge Fin FET Device Realizing by Atomic-layer Defect-free Etching with Chlorine Neutral Beam

2020 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) ◽

10.1109/vlsi-tsa48913.2020.9203657 ◽

2020 ◽

Author(s):

Daisuke Ohori ◽

Niraj Man Shrestha ◽

Yiming Li ◽

Jenn-Hwan Tarng ◽

Seiji Samukawa

Keyword(s):

High Performance ◽

Atomic Layer ◽

Neutral Beam ◽

Gan Hemt ◽

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High-performance and damage-free neutral-beam etching processes using negative ions in pulse-time-modulated plasma

Applied Surface Science ◽

10.1016/j.apsusc.2007.02.003 ◽

2007 ◽

Vol 253 (16) ◽

pp. 6681-6689 ◽

Author(s):

Seiji Samukawa

Keyword(s):

High Performance ◽

Negative Ions ◽

Neutral Beam ◽

Neutral Beam Etching

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High-Performance three-terminal FinFETs by Combination of Damage-Free Neutral-Beam Etching and Neutral-Beam Oxidation Technologies

10.7567/ssdm.2009.c-7-2 ◽

2009 ◽

Author(s):

K. Sano ◽

M. Yonemoto ◽

A. Wada ◽

K. Endo ◽

T. Matsukawa ◽

...

Keyword(s):

High Performance ◽

Neutral Beam ◽

Neutral Beam Etching

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High-performance and damage-free neutral beam etching for advanced ULSI devices

Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004. ◽

10.1109/icsict.2004.1435065 ◽

2005 ◽

Author(s):

S. Samukawa

Keyword(s):

High Performance ◽

Neutral Beam ◽

Neutral Beam Etching

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A new fabrication technology of FinFETs using a neutral beam etching

Digest of Papers Microprocesses and Nanotechnology 2005 ◽

10.1109/imnc.2005.203821 ◽

2005 ◽

Author(s):

K. Endo ◽

S. Noda ◽

T. Ozaki ◽

S. Samukawa ◽

M. Masahara ◽

...

Keyword(s):

Neutral Beam ◽

Fabrication Technology ◽

Neutral Beam Etching

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Novel Si Nanodisk Fabricated by Biotemplate and Defect-Free Neutral Beam Etching for Solar Cell Application

Japanese Journal of Applied Physics ◽

10.1143/jjap.49.04dl16 ◽

2010 ◽

Vol 49 (4) ◽

pp. 04DL16 ◽

Author(s):

Chi-Hsien Huang ◽

Makoto Igarashi ◽

Susumu Horita ◽

Masaki Takeguchi ◽

Yukiharu Uraoka ◽

...

Keyword(s):

Neutral Beam ◽

Solar Cell Application ◽

Si Nanodisk ◽

Neutral Beam Etching

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