Thin-film samples of the lithium ionic conductor Li2SiO3(LSO) were deposited on an A-plane sapphire substrate via the pulsed laser deposition (PLD) method, and the irreversible temperature dependence of the ionic conductivity in the thin-film samples was studied. Via transmission electron microscopy (TEM) observations of annealed LSO thin-film, it was found that the as-prepared LSO thin-film was amorphous over the temperature rangeT490 K, and that nanocrystals existed in the annealed LSO thin-film in the temperature rangeT550 K. Further more, it was clarified the irreversible temperature dependence of the ionic conductivity is due to the generation of nanocrystals.