A large number of monodispersed fine oxide particles, which are uniform in shape, size and composition, have been developed as ideal advanced materials. Recently, by the newly developed gel-sol method, various shapes of micron-sized monodispersed hematite particles (α-Fe2O3) were produced, such as peanut-type, ellipsoidal and pseudocubic shapes. To understand the growth mechanism of these particles, it is necessary to investigate their internal structures. In this study, in order to analyze three dimensional internal structure of these particles, we have prepared their successive thin sections with an ultramicrotome and carried out HREM study on these successive thin sections.Monodispersed peanut-type and pseudocubic particles were prepared by the standard procedures of the “gel-sol method. For carrying out ultramicrotomy, these particles were embedded with acrylic resin (methyl methacrylate: n-butyl methacrylate=3:7 or 4:6, benzoyl peroxide 1.5-1.7%) in a gelatin capsule. After trimming with a glass knife, successive thin sections of the particles were obtained by a diamond knife with the optimum slicing condition. The slicing speed and thickness were set to be 0.6 mm/sec and 70 nm, respectively.