Titanium dioxide (TiO2) nanothin films were deposited on unheated substrate, the glass slide and Si-wafer, by DC reactive magnetron sputtering with different substrate-target distance (dst), in range of 8 to 14 cm. The structural, surface morphology and transmittance spectrum of TiO2thin films were characterized by grazing-incidence X-ray diffraction (GI-XRD), atomic force microscopy (AFM) and spectrophotometer, respectively. XRD results show that as-deposited TiO2films with short substrate-target distance have only anatase crystal structure corresponding to the anatase in (101) and (200) plane, and turn to be amorphous with long substrate-target distance. The thickness and roughness varied from 50 nm to 142 nm and 1.6 nm to 3.5 nm, respectively. The as-deposited TiO2films exhibited high visible transmittance. The optical constants of the films, refractive index (n) and extinction coefficient (k), were calculated by Swanepoel method, at 550 nm, was about 2.43 - 2.76 and 0.082 - 0.187, respectively. The energy band gap (Eg) of the as-deposited TiO2films in the range of 3.20 - 3.25 was observed.