International Conference on Micro- and Nano-Electronics 2018
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104
(FIVE YEARS 104)

H-INDEX

2
(FIVE YEARS 2)

Published By SPIE

9781510627093, 9781510627109
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Plasma deposition of carbon-silicon nanocomposite for microelectromechanical applications

2019 ◽  
Author(s):  
Julia Y. Jityaeva ◽  
Sergey A. Lisitsyn ◽  
Oleg A. Ageev ◽  
Evgeny Y. Gusev
Keyword(s):  
Plasma Deposition

Deep silicon plasma etching: selection of processes for different applications

2019 ◽  
Author(s):  
Andrey V. Miakonkikh ◽  
Sergey N. Averkin ◽  
Konstantin V. Rudenko ◽  
Vladimir F. Lukichev
Keyword(s):  
Plasma Etching ◽  
Selection Of

Fabrication and properties of SOI-based planar silicon nanowire arrays

2019 ◽  
Author(s):  
Alexander E. Rogozhin ◽  
Andrew V. Miakonkikh ◽  
Andrew A. Tatarintsev ◽  
Konstantin V. Rudenko
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Arrays ◽  
Silicon Nanowire Arrays ◽  
Planar Silicon
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