ChemInform Abstract: GAS PHASE COMPOSITION CONSIDERATIONS IN THE THERMAL OXIDATION OF SILICON IN CHLORINE-HYDROGEN-OXYGEN AMBIENTS

1977 ◽  
Vol 8 (29) ◽  
pp. no-no
Author(s):  
R. E. TRESSLER ◽  
J. STACH ◽  
D. M. METZ
Keyword(s):  
Phase Composition ◽  
Thermal Oxidation ◽  
Gas Phase

Combined influence of chemostimulator oxides V2O5 and MnO2 introduced via the gas phase on InP thermal oxidation

2015 ◽  
Vol 85 (4) ◽  
pp. 796-801
Author(s):  
I. Ya. Mittova ◽  
N. N. Tretyakov ◽  
V. F. Kostryukov ◽  
B. V. Sladkopevtsev
Keyword(s):  
Thermal Oxidation ◽  
Gas Phase

Modified Physical Vapor Transport Growth of SiC - Control of Gas Phase Composition for Improved Process Conditions

2005 ◽  
Vol 483-485 ◽  
pp. 25-30 ◽  
Author(s):  
Peter J. Wellmann ◽  
Thomas L. Straubinger ◽  
Patrick Desperrier ◽  
Ralf Müller ◽  
Ulrike Künecke ◽  
...  
Keyword(s):  
Temperature Field ◽  
Phase Composition ◽  
Gas Phase ◽  
Growth Conditions ◽  
Vapor Transport ◽  
Physical Vapor Transport ◽  
Process Conditions ◽  
Growth Technique ◽  
Experimental Implementation ◽  
P Type

We review the development of a modified physical vapor transport (M-PVT) growth technique for the preparation of SiC single crystals which makes use of an additional gas pipe into the growth cell. While the gas phase composition is basically fixed in conventional physical vapor transport (PVT) growth by crucible design and temperature field, the gas inlet of the MPVT configuration allows the direct tuning of the gas phase composition for improved growth conditions. The phrase "additional" means that only small amounts of extra gases are supplied in order to fine-tune the gas phase composition. We discuss the experimental implementation of the extra gas pipe and present numerical simulations of temperature field and mass transport in the new growth configuration. The potential of the growth technique will be outlined by showing the improvements achieved for p-type doping of 4H-SiC with aluminum, i.e. [Al]=9⋅1019cm-3 and ρ<0.2Ωcm, and n-type doping of SiC with phosphorous, i.e. [P]=7.8⋅1017cm-3.

Role of solid- and gas-phase interactions in the coaction of the oxides in MnO2 + PbO and MnO2 + V2O5 compositions activating the thermal oxidation of GaAs

2007 ◽  
Vol 52 (10) ◽  
pp. 1498-1502 ◽  
Author(s):  
V. F. Kostryukov ◽  
V. R. Pshestanchik ◽  
I. A. Donkareva ◽  
B. L. Agapov ◽  
S. I. Lopatin ◽  
...  
Keyword(s):  
Thermal Oxidation ◽  
Gas Phase

Impact of Gas Phase Composition on Gas Hydrate Process for Carbon Dioxide Capturing from Gaseous Mixtures

2014 ◽  
Vol 625 ◽  
pp. 557-561 ◽  
Author(s):  
Behzad Partoon ◽  
Khalik Mohamad Sabil ◽  
Kok Keong Lau
Keyword(s):  
Carbon Dioxide ◽  
Phase Composition ◽  
Gas Phase ◽  
Gas Hydrate ◽  
Gas Mixtures ◽  
Gaseous Mixtures ◽  
Important Impact ◽  
New Process

Hydrate based technology is a promising new process for separation of Carbon dioxide from different gas mixtures. The process is claimed to be less energy intensive, green and low technology. In this article effect of composition on the efficiency of such process is discussed. CSMGem software is used for analysis. Results shows that gas phase composition have important impact on the efficiency of process.

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