Automation of a Mass Flow Controller for Application in Time-Multiplex SF6+CH4Plasma Etching of Silicon

2012 ◽  
Vol 52 (9) ◽  
pp. 735-743 ◽  
Author(s):  
L.L. Tezani ◽  
R.S. Pessoa ◽  
R.S. Moraes ◽  
H.S. Medeiros ◽  
C.A. Martins ◽  
...  
Keyword(s):  
Mass Flow ◽  
Mass Flow Controller ◽  
Flow Controller

New mass flow controller from Tylan General

Vacuum ◽  
1992 ◽  
Vol 43 (3) ◽  
pp. 263-264
Keyword(s):  
Mass Flow ◽  
Mass Flow Controller ◽  
Flow Controller

Design System of High-Velocity Oxygen Fuel (HVOF) Thermal Spray Coating Based on Computerization

2017 ◽  
Vol 728 ◽  
pp. 105-110
Author(s):  
Vita Susanti ◽  
Erie Martides ◽  
Midriem Mirdanies ◽  
Budi Prawara ◽  
Ant. Ardath Kristi ◽  
...  
Keyword(s):  
Thermal Spray ◽  
Mass Flow ◽  
High Velocity ◽  
Combustion Process ◽  
Spray Coating ◽  
Thermal Spray Coating ◽  
High Velocity Oxygen Fuel ◽  
Mass Flow Controller ◽  
Flow Controller ◽  
Oxygen Fuel

Wear and corrosion are problems prevalent in the industrialized world. One way to overcome this matter is the process of coating with a thermal spray coating. The coating process is categorized into two processes based on the heat source, i.e., combustion and electric. One example of combustion process is the high-velocity oxygen fuel (HVOF). The HVOF system which is operated manually has been studied in previous works. Computerized HVOF system is developed and manufactured in this study to improve reproducibility of coating and safety of operator. ATMega16 microcontroller was connected with several sensors (oxygen mass flow controller, nitrogen mass flow controller, propane mass flow controller, and pressure sensor), and Visual Studio.Net 2013 was used to create a graphic user interface (GUI). Based on test results obtained, it was found that the GUI successfully communicated using serial communications and could access the input/output (I/O) required by the microcontroller. Combinaton of gas mass flow controller and pressure sensors result in precise control of oxy-fuel combustion process.

Polymerization of ethylene oxide under controlled monomer addition via a mass flow controller for tailor made polyethylene oxides

2016 ◽  
Vol 7 (24) ◽  
pp. 4063-4071 ◽  
Author(s):  
Jürgen Vitz ◽  
Tobias C. Majdanski ◽  
Alexander Meier ◽  
Pierre J. Lutz ◽  
Ulrich S. Schubert
Keyword(s):  
Ethylene Oxide ◽  
Mass Flow ◽  
Structural Parameters ◽  
Polyethylene Oxides ◽  
Mass Flow Controller ◽  
Flow Controller

The synthesis of polymers with controlled molecular and structural parameters is challenging due to the required purity of the chemicals and the exclusion of protic impurities and oxygen in particular in the case of an anionic process as shown here.

Characteristic test methods of the thermal mass flow controller

2014 ◽  
Vol 28 (3) ◽  
pp. 907-914 ◽  
Author(s):  
Yong Moon Choi ◽  
Hae Man Choi ◽  
Saeng Hee Lee ◽  
Woong Kang
Keyword(s):  
Mass Flow ◽  
Test Methods ◽  
Thermal Mass ◽  
Mass Flow Controller ◽  
Flow Controller

Development and characterization of a time-based, mass flow controller

2007 ◽  
Vol 221 (4) ◽  
pp. 207-217 ◽  
Author(s):  
G. L. Quarini ◽  
T Chinarak ◽  
Y. C. Chang
Keyword(s):  
Mass Flow ◽  
Mass Flow Controller ◽  
Flow Controller

Mems Mass Flow Controller for Liquid Fuel Supply to HCCI-Driven Engine

2019 ◽  
Author(s):  
Michael Schiffer ◽  
Piotr Mackowiak ◽  
Ha-Duong Ngo ◽  
Oswin Ehrmann ◽  
Martin Schneider-Ramelow ◽  
...  
Keyword(s):  
Mass Flow ◽  
Liquid Fuel ◽  
Fuel Supply ◽  
Mass Flow Controller ◽  
Flow Controller

Development of the Liquid Mass-Flow Controller

1997 ◽  
Vol 17 (Supplement2) ◽  
pp. 235-238
Author(s):  
Hiroshi FUJITA ◽  
Naoaki SAKURAI ◽  
Tokio SUGI ◽  
Shigemi KATO
Keyword(s):  
Mass Flow ◽  
Liquid Mass ◽  
Mass Flow Controller ◽  
Flow Controller
Sign in / Sign up

Export Citation Format

Share Document