Low-energy irradiation effects of gas cluster ion beams

2008 ◽  
Vol 91 (2) ◽  
pp. 40-45 ◽  
Author(s):  
Shingo Houzumi ◽  
Keigo Takeshima ◽  
Kozo Mochiji ◽  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Energy Irradiation ◽  
Cluster Ion

scholarly journals Low-Energy Irradiation Effects of Gas Cluster Ion Beams

2007 ◽  
Vol 127 (3) ◽  
pp. 312-316 ◽  
Author(s):  
Shingo Houzumi ◽  
Keigo Takeshima ◽  
Kozo Mochiji ◽  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Energy Irradiation ◽  
Cluster Ion

Irradiation Effects of Ar-Cluster Ion Beams on Si Surfaces

1993 ◽  
Vol 316 ◽  
Author(s):  
G. H. Takaoka ◽  
G. Sugahara ◽  
R. E. Hummel ◽  
J. A. Northby ◽  
M. Sosnowski ◽  
...  
Keyword(s):  
Cluster Size ◽  
Ion Beams ◽  
Cluster Ions ◽  
Irradiation Effects ◽  
Damage Layer ◽  
Ion Energies ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
The Mean

ABSTRACTThe effects of energetic Ar cluster ion impacts on Si(111) surfaces have been studied for cluster energies up to l5keV. The mean cluster size was about 1000 atoms, and the smaller sizes could be systematically excluded. Si samples irradiated at different cluster ion energies were analyzed by RBS, ellipsometry, and differential reflectometry. Implantation of Ar in samples irradiated with cluster ions was found by RBS to be detectable, but very small in comparison with samples irradiated with monomer ions of the same energy. The thickness of the damage layer as measured by both ellipsometry and differential reflectometry was also much smaller in the cluster ion irradiated samples.

LOW-DAMAGE SURFACE TREATMENT BY GAS CLUSTER-ION BEAMS

1996 ◽  
Vol 03 (01) ◽  
pp. 891-895 ◽  
Author(s):  
M. AKIZUKI ◽  
M. HARADA ◽  
Y. MIYAI ◽  
A. DOI ◽  
T. YAMAGUCHI ◽  
...  
Keyword(s):  
Room Temperature ◽  
Ion Irradiation ◽  
Normal Incidence ◽  
Ion Beams ◽  
Low Doses ◽  
Si Substrate ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Substrate Surfaces

Low-damage irradiation effects of gas cluster-ion beams have been studied at acceleration voltages below 20 kV. The surfaces of targets have been smoothened significantly by CO 2-cluster-ion irradiation at normal incidence. Si substrate surfaces have been cleaned and exhibited low damage after CO 2- and Ar-cluster-ion irradiation at low doses. In the case of CO 2-cluster-ion irradiation, SiO 2 film of about 5.5-nm thickness have grown on Si substrate at room temperature. A damaged layer of less than 2.5-nm thickness has been formed underneath the SiO 2 film.

Irradiation effects of liquid cluster ion beams on silicon surfaces

2007 ◽  
Vol 201 (19-20) ◽  
pp. 8628-8631 ◽  
Author(s):  
Gikan H. Takaoka ◽  
Masakazu Kawashita ◽  
Hidetaka Noguchi ◽  
Kazuya Nakayama
Keyword(s):  
Ion Beams ◽  
Silicon Surfaces ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion

Surface Planarization with Gas Cluster Ion Beams and Application to Wide-Bandgap Semiconductors

2018 ◽  
Vol 12 (2) ◽  
pp. 170-174 ◽  
Author(s):  
Noriaki Toyoda ◽  
Keyword(s):  
Wide Bandgap ◽  
Ion Beams ◽  
Cluster Ions ◽  
Irradiation Effects ◽  
Atomic Ions ◽  
Smoothing Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Multiple Collisions ◽  
Bandgap Semiconductors

In this study, the fundamental sputtering effects of gas cluster ion beams (GCIBs), especially for surface planarization, are reported. Because gas cluster ions are aggregates of thousands of gas atoms, the collision process for a GCIB, with dense and multiple collisions, differs from that of atomic ions via collision cascading; thus, GCIBs have many unique irradiation effects. Among them, the low-damage and surface smoothing effects are beneficial for the planarization of wide-bandgap semiconductor wafers. The planarization of SiC, diamond, and GaN has been demonstrated using GCIB irradiation.

Irradiation Effects of Gas Cluster Ion Beams on Co–Fe Films

2013 ◽  
Vol 52 (6S) ◽  
pp. 06GF01 ◽  
Author(s):  
Noriaki Toyoda ◽  
Akihiro Fujimoto ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion

scholarly journals Tuning the electronic properties of LaAlO3 / SrTiO3 interfaces by irradiating the LaAlO3 surface with low-energy cluster ion beams

2018 ◽  
Vol 97 (3) ◽  
Author(s):  
Karl Ridier ◽  
Damien Aureau ◽  
Bruno Bérini ◽  
Yves Dumont ◽  
Niels Keller ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Ion Beams ◽  
Low Energy ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Energy Cluster

scholarly journals Irradiation effects on solid surfaces by water cluster ion beams

Vacuum ◽  
2009 ◽  
Vol 84 (5) ◽  
pp. 501-504 ◽  
Author(s):  
Hiromichi Ryuto ◽  
Keiji Tada ◽  
Gikan H. Takaoka
Keyword(s):  
Water Cluster ◽  
Ion Beams ◽  
Solid Surfaces ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Cluster Ion
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