Plasma‐immersion ion implantation: A path to lower the annealing temperature of implanted boron emitters and simplify PERT solar cell processing
2019 ◽
Vol 27
(12)
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pp. 1081-1091
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Adeline Lanterne
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Thibaut Desrues
◽
Coralie Lorfeuvre
◽
Marianne Coig
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Frank Torregrosa
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...
2017 ◽
Vol 1
(2)
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pp. 1600007
◽
Tristan Carrere
◽
Delfina Muñoz
◽
Marianne Coig
◽
Christophe Longeaud
◽
Jean-Paul Kleider
2014 ◽
Vol 115
(6)
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pp. 064505
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F. L. Bregolin
◽
K. Krockert
◽
S. Prucnal
◽
L. Vines
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R. Hübner
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...
2020 ◽
Vol 1695
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pp. 012009
O O Permyakova
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A V Miakonkikh
◽
K V Rudenko
◽
A E Rogozhin
Sung Ju Han
◽
Min Seo
◽
Min Gyeong Cho
◽
Young-Wan Kwon
◽
Sang-Ho Lim
◽
...
2006 ◽
Vol 99
(9)
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pp. 093509
◽
A. Bentzen
◽
A. Holt
◽
R. Kopecek
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G. Stokkan
◽
J. S. Christensen
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...
2007 ◽
Vol 201
(15)
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pp. 6615-6618
◽
Tao Sun
◽
Langping Wang
◽
Yonghao Yu
◽
Yuhang Wang
◽
Xiaofeng Wang
◽
...
2003 ◽
Vol 44
(2)
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pp. 101
T.K. Kwok
◽
X.C. Zeng
◽
P.K. Chu
2007 ◽
Vol 50
(5-6)
◽
pp. 789-798
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