Frequency Scaling Laws of Plasma Bulk in Atmospheric Radio Frequency Discharges

2012 ◽  
Vol 9 (5) ◽  
pp. 513-521 ◽  
Author(s):  
Yuantao T. Zhang ◽  
Wanli Shang
Keyword(s):  
Radio Frequency ◽  
Scaling Laws ◽  
Frequency Scaling ◽  
Atmospheric Radio ◽  
Radio Frequency Discharges ◽  
Plasma Bulk

Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations*

1993 ◽  
Vol 5 (7) ◽  
pp. 2719-2729 ◽  
Author(s):  
V. Vahedi ◽  
C. K. Birdsall ◽  
M. A. Lieberman ◽  
G. DiPeso ◽  
T. D. Rognlien
Keyword(s):  
Radio Frequency ◽  
Scaling Laws ◽  
Two Dimensional ◽  
Frequency Scaling ◽  
Radio Frequency Discharges

Numerical investigation of pulse-modulated atmospheric radio frequency discharges in helium under different duty cycles

2011 ◽  
Vol 18 (12) ◽  
pp. 123502 ◽  
Author(s):  
Jizhong Sun ◽  
Qi Wang ◽  
Zhengfen Ding ◽  
Xuechun Li ◽  
Dezhen Wang
Keyword(s):  
Radio Frequency ◽  
Numerical Investigation ◽  
Duty Cycles ◽  
Atmospheric Radio ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges

Excitation in radio-frequency discharges

1963 ◽  
Vol 19 (8) ◽  
pp. 1309-1317 ◽  
Author(s):  
R. Mavrodineanu ◽  
R.C. Hughes
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges
Sign in / Sign up

Export Citation Format

Share Document