The characteristics of atmospheric radio frequency discharges with frequency increasing at a constant power density

2010 ◽  
Vol 97 (14) ◽  
pp. 141504 ◽  
Author(s):  
Yuan Tao Zhang ◽  
Qing Quan Li ◽  
Jie Lou ◽  
Qing Min Li
Keyword(s):  
Radio Frequency ◽  
Power Density ◽  
Constant Power ◽  
Atmospheric Radio ◽  
Radio Frequency Discharges

Numerical investigation of pulse-modulated atmospheric radio frequency discharges in helium under different duty cycles

2011 ◽  
Vol 18 (12) ◽  
pp. 123502 ◽  
Author(s):  
Jizhong Sun ◽  
Qi Wang ◽  
Zhengfen Ding ◽  
Xuechun Li ◽  
Dezhen Wang
Keyword(s):  
Radio Frequency ◽  
Numerical Investigation ◽  
Duty Cycles ◽  
Atmospheric Radio ◽  
Radio Frequency Discharges

A self-consistent fluid model for radio-frequency discharges in SiH4–H2 compared to experiments

1997 ◽  
Vol 82 (5) ◽  
pp. 2060-2071 ◽  
Author(s):  
G. J. Nienhuis ◽  
W. J. Goedheer ◽  
E. A. G. Hamers ◽  
W. G. J. H. M. van Sark ◽  
J. Bezemer
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Self Consistent ◽  
Radio Frequency Discharges
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