An approach for single crystalline zinc oxide thin films with fine channel mist chemical vapor deposition method

2008 ◽  
Vol 5 (9) ◽  
pp. 3138-3140 ◽  
Author(s):  
Toshiyuki Kawaharamura ◽  
Shizuo Fujita
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Oxide Thin Films ◽  
Single Crystalline

Growth of zinc oxide thin films on Y2O3/Si substrates by chemical vapor deposition

2005 ◽  
Vol 275 (1-2) ◽  
pp. e2481-e2485 ◽  
Author(s):  
Chih-Wei Lin ◽  
Tsan-Yao Cheng ◽  
Li Chang ◽  
Jenh-Yih Juang
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Oxide Thin Films ◽  
Si Substrates

Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

2008 ◽  
Vol 516 (5) ◽  
pp. 687-690 ◽  
Author(s):  
Hiroaki Yasuoka ◽  
Masahiro Yoshida ◽  
Ken Sugita ◽  
Keisuke Ohdaira ◽  
Hideyuki Murata ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Chemical Vapor Deposition Method ◽  
Deposition Method ◽  
Catalytic Chemical Vapor Deposition
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