Fabrication of Silicon Oxide Thin Films by Mist Chemical Vapor Deposition Method from Polysilazane and Ozone as Sources

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Deposition Method ◽

Oxide Thin Films

Fabrication of Silicon Oxide Thin Films by Mist Chemical Vapor Deposition Method from Polysilazane and Ozone as Sources

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.090201 ◽

2012 ◽

Vol 51 (9R) ◽

pp. 090201 ◽

Cited By ~ 10

Author(s):

Jinchun Piao ◽

Shigetaka Katori ◽

Toshiyuki Kawaharamura ◽

Chaoyang Li ◽

Shizuo Fujita

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Deposition Method ◽

Oxide Thin Films

An approach for single crystalline zinc oxide thin films with fine channel mist chemical vapor deposition method

physica status solidi (c) ◽

10.1002/pssc.200779305 ◽

2008 ◽

Vol 5 (9) ◽

pp. 3138-3140 ◽

Cited By ~ 24

Author(s):

Toshiyuki Kawaharamura ◽

Shizuo Fujita

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Method ◽

Oxide Thin Films ◽

Single Crystalline

Growth of gallium oxide thin films on silicon by the metal organic chemical vapor deposition method

Materials Science and Engineering B ◽

10.1016/j.mseb.2004.01.012 ◽

2004 ◽

Vol 110 (1) ◽

pp. 34-37 ◽

Cited By ~ 47

Author(s):

Hyoun Woo Kim ◽

Nam Ho Kim

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Gallium Oxide ◽

Chemical Vapor ◽

Organic Chemical ◽

Deposition Method ◽

Metal Organic ◽

Organic Chemical Vapor Deposition

Microstructure and Optical Properties of Al[sub x]Ga[sub 1−x]N∕GaN Heterostructure Thin Films Grown on Si(111) Substrate by Plasma Assisted Metalorganic Chemical Vapor Deposition Method

10.1063/1.2906048 ◽

2008 ◽

Author(s):

H. Sutanto ◽

A. Subagio ◽

E. Supriyanto ◽

P. Arifin ◽

M. Budiman ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Vapor Deposition ◽

Metalorganic Chemical Vapor Deposition ◽

Chemical Vapor ◽

Deposition Method ◽

Gan Heterostructure ◽

Metalorganic Chemical

Preparation of yttrium iron garnet thin films by mist chemical vapor deposition method and their magneto-optical properties

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.05fb17 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FB17 ◽

Cited By ~ 7

Author(s):

Situ Yao ◽

Takashi Sato ◽

Kentaro Kaneko ◽

Shunsuke Murai ◽

Koji Fujita ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Vapor Deposition ◽

Yttrium Iron Garnet ◽

Chemical Vapor ◽

Deposition Method ◽

Yttrium Iron ◽

Iron Garnet

Preparation of SrBi2Ta2O9 Ferroelectric Thin Films by Liquid Source Misted Chemical Vapor Deposition Method Using Inorganic Salt Solution

High-Performance Ceramics III - Key Engineering Materials ◽

10.4028/0-87849-959-8.853 ◽

2007 ◽

pp. 853-856

Author(s):

Hui Ming Ji ◽

Yan Fei Gu ◽

Hui Meng ◽

Ting Xian Xu

Keyword(s):

Thin Films ◽

Salt Solution ◽

Vapor Deposition ◽

Inorganic Salt ◽

Chemical Vapor ◽

Ferroelectric Thin Films ◽

Deposition Method ◽

Liquid Source

Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.112 ◽

2011 ◽

Vol 257 (23) ◽

pp. 9717-9723 ◽

Cited By ~ 24

Author(s):

Sumita Mukhopadhyay ◽

Swati Ray

Keyword(s):

Radio Frequency ◽

Structural Properties ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma

The origin of visible photoluminescence from silicon oxide thin films prepared by dual-plasma chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.367407 ◽

1998 ◽

Vol 83 (10) ◽

pp. 5386-5393 ◽

Cited By ~ 62

Author(s):

M. Zhu ◽

Y. Han ◽

R. B. Wehrspohn ◽

C. Godet ◽

R. Etemadi ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Oxide Thin Films ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Visible Photoluminescence

Electron emission from diamond thin films deposited by microwave plasma-chemical vapor deposition method

Diamond and Related Materials ◽

10.1016/s0925-9635(00)00325-3 ◽

2000 ◽

Vol 9 (9-10) ◽

pp. 1604-1607 ◽

Cited By ~ 5

Author(s):

Changzhi Gu ◽

Zengsun Jin ◽

Yuguang Wang ◽

Wencheng Jin ◽

Hong Ji ◽

...

Keyword(s):

Thin Films ◽

Electron Emission ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Deposition Method ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Thin Solid Films ◽

10.1016/j.tsf.2007.06.185 ◽

2008 ◽

Vol 516 (5) ◽

pp. 687-690 ◽

Cited By ~ 26

Author(s):

Hiroaki Yasuoka ◽

Masahiro Yoshida ◽

Ken Sugita ◽

Keisuke Ohdaira ◽

Hideyuki Murata ◽

...

Keyword(s):

Thin Films ◽

Vapor Deposition ◽

Chemical Vapor ◽

Catalytic Chemical Vapor Deposition

Deposition Method ◽