Reduction of Residual Impurities in Homoepitaxial m
-Plane (101¯0) GaN by Using N2
 Carrier Gas in Metalorganic Vapor Phase Epitaxy (Phys. Status Solidi RRL 8/2018)

Vapor Phase Epitaxy ◽

Carrier Gas ◽

Reduction of Residual Impurities in Homoepitaxial m -Plane (101¯0) GaN by Using N2 Carrier Gas in Metalorganic Vapor Phase Epitaxy

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.201800124 ◽

2018 ◽

Vol 12 (8) ◽

pp. 1800124

Author(s):

Ousmane I Barry ◽

Kaddour Lekhal ◽

Si-Young Bae ◽

Ho-Jun Lee ◽

Markus Pristovsek ◽

...

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Carrier Gas ◽

Reduction in residual impurities in semi-polar 303¯1¯ and 202¯1¯ GaN grown by metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/j.jcrysgro.2019.02.005 ◽

2019 ◽

Vol 512 ◽

pp. 119-123

Author(s):

Hisashi Yamada ◽

Hiroshi Chonan ◽

Toshikazu Yamada ◽

Mitsuaki Shimizu

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Carrier Gas Dependent Evaporation Energy of GaN Estimated from Spiral Growth Rates in Selective-Area Metalorganic Vapor Phase Epitaxy

Applied Physics Express ◽

10.7567/apex.6.105501 ◽

2013 ◽

Vol 6 (10) ◽

pp. 105501 ◽

Cited By ~ 4

Author(s):

Tetsuya Akasaka ◽

Yasuyuki Kobayashi ◽

Makoto Kasu ◽

Hideki Yamamoto

Keyword(s):

Vapor Phase ◽

Growth Rates ◽

Vapor Phase Epitaxy ◽

Spiral Growth ◽

Carrier Gas ◽

Selective Area ◽

Evaporation Energy

Metalorganic vapor phase epitaxy growth of ZnSe films using argon carrier gas

Journal of Crystal Growth ◽

10.1016/0022-0248(92)90724-w ◽

1992 ◽

Vol 117 (1-4) ◽

pp. 102-106 ◽

Cited By ~ 1

Author(s):

A. Ohki ◽

Y. Kawaguchi ◽

K. Ando ◽

S. Zembutsu

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Nitrogen as carrier gas for the growth of ZnSe and ZnSe:N in plasma enhanced metalorganic vapor phase epitaxy

Journal of Crystal Growth ◽

10.1016/s0022-0248(96)00594-5 ◽

1997 ◽

Vol 170 (1-4) ◽

pp. 491-496 ◽

Cited By ~ 4

Author(s):

W. Taudt ◽

A. Hardt ◽

S. Lampe ◽

H. Hamadeh ◽

M. Heuken

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140) ◽

Surface morphology of metalorganic vapor phase epitaxy grown GaAs, GaInP for heterojunction bipolar transistor applications with nitrogen as the carrier gas

10.1109/commad.1998.791682 ◽

2002 ◽

Author(s):

C.C. Hsu ◽

J.B. Xu

Keyword(s):

Surface Morphology ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Bipolar Transistor ◽

Heterojunction Bipolar Transistor ◽

Influence of the Carrier Gas Composition on Metalorganic Vapor Phase Epitaxy of Gallium Nitride

Technical Physics Letters ◽

10.1134/1.1920375 ◽

2005 ◽

Vol 31 (4) ◽

pp. 293 ◽

Cited By ~ 8

Author(s):

W. V. Lundin

Keyword(s):

Gallium Nitride ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Gas Composition ◽

Characterization of Crack-Free AlN/GaN Multiple Quantum Wells Grown by Metalorganic Vapor Phase Epitaxy Using H2 as a Carrier Gas

physica status solidi (b) ◽

10.1002/1521-3951(200212)234:3<961::aid-pssb961>3.0.co;2-4 ◽

2002 ◽

Vol 234 (3) ◽

pp. 961-964 ◽

Cited By ~ 2

Author(s):

I. Waki ◽

C. Kumtornkittikul ◽

K. Sato ◽

Y. Shimogaki ◽

Y. Nakano

Keyword(s):

Quantum Wells ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Multiple Quantum Wells ◽

Multiple Quantum ◽

High-Quality InGaAsN Growth by Metalorganic Vapor-Phase Epitaxy Using Nitrogen Carrier Gas and Dimethylhydrazine, Tertiarybutylarsine as Group V Precursors

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.1019 ◽

1999 ◽

Vol 38 (Part 1, No. 2B) ◽

pp. 1019-1021 ◽

Cited By ~ 17

Author(s):

Abdallah Ougazzaden ◽

Elchuri Rao ◽

Bernard Sermage ◽

Laurent Leprince ◽

Marcel Gauneau

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

High Quality ◽

Group V ◽

Residual impurities in GaN/Al2O3 grown by metalorganic vapor phase epitaxy

Journal of Electronic Materials ◽

10.1007/bf02666639 ◽

1996 ◽

Vol 25 (5) ◽

pp. 799-803 ◽

Cited By ~ 35

Author(s):

Akihiko Ishibashi ◽

Hidemi Takeishi ◽

Masaya Mannoh ◽

Yasufumi Yabuuchi ◽

Yuzaburoh Ban

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽