Compositional analysis of SiOxNy:H films by heavy-ion ERDA: the problem of radiation damage
1975 ◽
Vol 56
(3)
◽
pp. 355-358
◽
Keyword(s):
1991 ◽
Vol 19
(1-4)
◽
pp. 121-126
◽
1977 ◽
Vol 143
(1)
◽
pp. 125-132
◽
Keyword(s):
Keyword(s):
1998 ◽
Vol 136-138
◽
pp. 707-712
◽
2004 ◽
Vol 217
(2)
◽
pp. 237-245
◽
1989 ◽
Vol 16
(4)
◽
pp. 279-281