Noble gas depth profiles in amorphous TiO2 films after sputtering

1988 ◽  
Vol 12 (2) ◽  
pp. 93-98 ◽  
Author(s):  
M. Wolff ◽  
J. W. Schultze
Author(s):  
Benjamin Rich ◽  
Yael Etinger-Geller ◽  
G. Ciatto ◽  
A Katsman ◽  
Boaz Pokroy

Size effects and structural modifications in amorphous TiO2 films deposited by atomic layer deposition (ALD) were investigated. As with the previously investigated ALD-deposited Al2O3 system we found that the film’s...


2017 ◽  
Vol 53 (6) ◽  
pp. 1022-1027 ◽  
Author(s):  
Julius Andrew P. Nuñez ◽  
Hernando S. Salapare ◽  
Michelle Marie S. Villamayor ◽  
Luis De Los Santos Valladares ◽  
Henry J. Ramos

2018 ◽  
Vol 1 (8) ◽  
pp. 3607-3613 ◽  
Author(s):  
Jaime A. Benavides ◽  
Charles P. Trudeau ◽  
Luis F. Gerlein ◽  
Sylvain G. Cloutier

2012 ◽  
Vol 27 (17) ◽  
pp. 2271-2277 ◽  
Author(s):  
Diana Mardare ◽  
Abdullah Yildiz ◽  
Radu Apetrei ◽  
Petronela Rambu ◽  
Daniel Florea ◽  
...  

Abstract


1996 ◽  
Vol 68 (21) ◽  
pp. 2965-2967 ◽  
Author(s):  
Hyun‐Kwon Ha ◽  
Mamoru Yoshimoto ◽  
Hideomi Koinuma ◽  
Bum‐Ki Moon ◽  
Hiroshi Ishiwara

2021 ◽  
pp. 3709-3714
Author(s):  
Pakpoom Buabthong ◽  
Jake M. Evans ◽  
Katherine Z. Rinaldi ◽  
Kathleen M. Kennedy ◽  
Harold J. Fu ◽  
...  

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