Applications of the ‘CATGIXRF’ computer program to the grazing incidence X-ray fluorescence and X-ray reflectivity characterization of thin films and surfaces

AbstractGrazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

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The Characterization of Thin Films and Layered Structures Using X-RAY Absorption and Reflection at Grazing Incidence

MRS Proceedings ◽

10.1557/proc-37-437 ◽

1984 ◽

Vol 37 ◽

Cited By ~ 1

Author(s):

S. M. Heald ◽

J. M. Tranquada ◽

D. O. Welch ◽

H. Chen

Keyword(s):

Thin Films ◽

Fine Structure ◽

High Resolution ◽

Grazing Incidence ◽

X Rays ◽

X Ray ◽

Surface And Interface ◽

Interface Structures ◽

X Ray Absorption

AbstractX-rays at grazing incidence have a short, controllable penetration depth and are well suited as a probe of surface and interface structures. This paper examines the possibility applying grazing-incidence reflectivity and Extended X-Ray Absorption Fine Structure (EXAFS) measurements to such systems. Results are presented for an Al-Cu couple for which both high resolution reflectivity and interface EXAFS measurements are made. The latter results are the first interface specific EXAFS data to be reported. Distinct changes in both signals are observed upon annealing, demonstrating the potential of the techniques.

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Characterization of in-plane structures of vapor deposited thin-films of distyryl-oligothiophenes by grazing incidence x-ray diffractometry

Crystal Research and Technology ◽

10.1002/crat.200711010 ◽

2007 ◽

Vol 42 (12) ◽

pp. 1228-1231 ◽

Cited By ~ 3

Author(s):

Noriyuki Yoshimoto ◽

Keijyu Aosawa ◽

Toshinori Taniswa ◽

Kazuhiko Omote ◽

J. Ackermann ◽

...

Keyword(s):

Thin Films ◽

Grazing Incidence ◽

X Ray

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Determination of Crystal Structure and Cation Distribution in Thin Films

Advances in X-ray Analysis ◽

10.1154/s0376030800008788 ◽

1991 ◽

Vol 35 (A) ◽

pp. 151-157

Author(s):

G. Will ◽

T. C. Huang ◽

F. Sequeda

Keyword(s):

Crystal Structure ◽

Thin Films ◽

Grazing Incidence ◽

High Tech ◽

X Ray Diffraction ◽

X Ray ◽

Depth Profiles ◽

Scanning Geometry

The structural characterization of thin films is important for research development and manufacturing of electronic, magnetic, optical, and other high-tech materials. The grazing incidence X-ray diffraction technique has bean used successfully for the determination of crystalline phases, structural-depth profiles, crystallite size, and strain, etc. of thin films with thickness's down to a few tens of Å, If the crystal structure, e.g. the distribution of atoms in the unit cell, or the crystallinity and texture (or preferred orientation) of a film is of interest, the conventional Bragg-Brentano diffractometer technique with the θ-2θ scanning geometry has been found to be appropriate.

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Characterization of the Non-uniform Reaction in Chemically Amplified Calix[4]resorcinarene Molecular Resist Thin Films

Australian Journal of Chemistry ◽

10.1071/ch11242 ◽

2011 ◽

Vol 64 (8) ◽

pp. 1065 ◽

Cited By ~ 4

Author(s):

Vivek M. Prabhu ◽

Shuhui Kang ◽

R. Joseph Kline ◽

Dean M. DeLongchamp ◽

Daniel A. Fischer ◽

...

Keyword(s):

Thin Films ◽

Grazing Incidence ◽

Neutron Reflectivity ◽

X Ray Diffraction ◽

X Ray ◽

Organic Bases ◽

Reaction Extent ◽

X Ray Absorption ◽

Surface Layer Thickness

The ccc stereoisomer-purified tert-butoxycarbonyloxy-protected calix[4]resorcinarene molecular resists blended with photoacid generator exhibit a non-uniform photoacid-catalyzed reaction in thin films. The surface displays a reduced reaction extent, compared with the bulk, with average surface-layer thickness 7.0 ± 1.8 nm determined by neutron reflectivity with deuterium-labelled tert-butoxycarbonyloxy groups. Ambient impurities (amines and organic bases) are known to quench surface reactions and contribute, but grazing-incidence X-ray diffraction shows an additional effect that the protected molecular resists are preferentially oriented at the surface, whereas the bulk of the film displays diffuse scattering representative of amorphous packing. The surface deprotection reaction and presence of photoacid were quantified by near-edge X-ray absorption fine-structure measurements.

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