scholarly journals Grazing Incidence X-ray Fluorescence Spectrometry and Reflectrometry with Synchrotron Radiation. A New Tool for Characterization of Thin Films.

1993 ◽  
Vol 32 (5) ◽  
pp. 323-330
Author(s):  
Kenji Sakurai
Keyword(s):  
Thin Films ◽  
Synchrotron Radiation ◽  
Grazing Incidence ◽  
Fluorescence Spectrometry ◽  
X Ray

Characterization of Permalloy Thin Films Via Variable Sample Exit Angle Ultrasoft X-Ray Fluorescence Spectrometry

1989 ◽  
pp. 261-268 ◽  
Author(s):  
George Andermann ◽  
Francis Fujiwara ◽  
T. C. Huang ◽  
J. K. Howard ◽  
N. Staud
Keyword(s):  
Thin Films ◽  
Fluorescence Spectrometry ◽  
Exit Angle ◽  
X Ray ◽  
Permalloy Thin Films

Characterization of Permalloy Thin Films via Variable Sample Exit Angle Ultrasoft X-ray Fluorescence Spectrometry

1988 ◽  
Vol 32 ◽  
pp. 261-268 ◽  
Author(s):  
George Andermann ◽  
Francis Fujiwara ◽  
T.C. Huang ◽  
J.K. Howard ◽  
N. Staud
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Analytical Tool ◽  
Fluorescence Spectrometry ◽  
Exit Angle ◽  
X Ray ◽  
Escape Depth ◽  
Sample Depth ◽  
Permalloy Thin Films

Recently variable sample exit-angle x-ray fluorescence spectrometry (VEA-XRF) has been shorn to be a useful analytical tool for monitoring the oxidation of the surfaces of bulk Cu, Ni as well as that of Fe. In these studies advantage was taken of the well known phenomenon that for each transition metal oxide (MO) Lβ/Lα intensity ratio value is higher than for the transition metal (M), itself. Within the limits of the photon-escape depth de, which for these photons are generally below 5000 Å, varying the sample exit-angle θ offers an opportunity for seeing whether or not the oxidation of the surfaces of bulk M belongs to one of the following two classes: (I) uniform oxidation throughout the entire observable sample-depth, (II) preferential oxidation of the top surface layer, i.e. depth dependent oxidation.

Grazing-incidence X-Ray Analysis of Surfaces and Thin Films

1991 ◽  
Vol 35 (A) ◽  
pp. 143-150 ◽  
Author(s):  
T. C. Huang
Keyword(s):  
Thin Films ◽  
Depth Profiling ◽  
Grazing Incidence ◽  
Bragg Diffraction ◽  
Interface Roughness ◽  
Phase Identification ◽  
X Ray ◽  
Types Of Information

AbstractGrazing-incidence X-ray analysis techniques which are commonly used for the nondestructive characterization of surfaces and thin films are reviewed. The X-ray reflectivity technicue is used to study surface uniformity and oxidation, layer thickness and density, interface roughness and diffusion, etc. The grazing-incidence in-plane diffraction technique is used to determine in-plane crystallography of epitaxial films. The grazing-incidence asymmetric-Bragg diffraction is used for surface phase identification and structural depth profiling determination of polycrystalline films. Typical examples to illustrate the types of information that can be obtained by the techniques are presented.

The Characterization of Thin Films and Layered Structures Using X-RAY Absorption and Reflection at Grazing Incidence

1984 ◽  
Vol 37 ◽  
Author(s):  
S. M. Heald ◽  
J. M. Tranquada ◽  
D. O. Welch ◽  
H. Chen
Keyword(s):  
Thin Films ◽  
Fine Structure ◽  
High Resolution ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray ◽  
Surface And Interface ◽  
Interface Structures ◽  
X Ray Absorption

AbstractX-rays at grazing incidence have a short, controllable penetration depth and are well suited as a probe of surface and interface structures. This paper examines the possibility applying grazing-incidence reflectivity and Extended X-Ray Absorption Fine Structure (EXAFS) measurements to such systems. Results are presented for an Al-Cu couple for which both high resolution reflectivity and interface EXAFS measurements are made. The latter results are the first interface specific EXAFS data to be reported. Distinct changes in both signals are observed upon annealing, demonstrating the potential of the techniques.

Characterization of in-plane structures of vapor deposited thin-films of distyryl-oligothiophenes by grazing incidence x-ray diffractometry

2007 ◽  
Vol 42 (12) ◽  
pp. 1228-1231 ◽  
Author(s):  
Noriyuki Yoshimoto ◽  
Keijyu Aosawa ◽  
Toshinori Taniswa ◽  
Kazuhiko Omote ◽  
J. Ackermann ◽  
...  
Keyword(s):  
Thin Films ◽  
Grazing Incidence ◽  
X Ray

Grazing Incidence X-Ray Spectroscopy for Thin Layer Analysis

1991 ◽  
Vol 35 (B) ◽  
pp. 807-812
Author(s):  
Hideki Hashimoto ◽  
Hiroshi Nishioji ◽  
Hideo Saisho
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
Synchrotron Radiation ◽  
Grazing Incidence ◽  
High Density ◽  
Homogeneous Layer ◽  
Treatment Results ◽  
Titanium Layer ◽  
X Ray ◽  
Layer Analysis

AbstractReflection and fluorescence intensity profile curves for thin films were measured under the grazing incidence conditions using synchrotron radiation. A titanium layer and a carbon / titanium bilayer sputtered on a silicon wafer were subjected to heat treatment. The analysis of the reflection and fluorescence profile curves shows that the sample without the heat treatment has another high-density layer on the surface or interface, and that the heat treatment results in the removal of the high-density layer and the formation of a thick homogeneous layer.

Determination of Crystal Structure and Cation Distribution in Thin Films

1991 ◽  
Vol 35 (A) ◽  
pp. 151-157
Author(s):  
G. Will ◽  
T. C. Huang ◽  
F. Sequeda
Keyword(s):  
Crystal Structure ◽  
Thin Films ◽  
Grazing Incidence ◽  
High Tech ◽  
X Ray Diffraction ◽  
X Ray ◽  
Depth Profiles ◽  
Scanning Geometry

The structural characterization of thin films is important for research development and manufacturing of electronic, magnetic, optical, and other high-tech materials. The grazing incidence X-ray diffraction technique has bean used successfully for the determination of crystalline phases, structural-depth profiles, crystallite size, and strain, etc. of thin films with thickness's down to a few tens of Å, If the crystal structure, e.g. the distribution of atoms in the unit cell, or the crystallinity and texture (or preferred orientation) of a film is of interest, the conventional Bragg-Brentano diffractometer technique with the θ-2θ scanning geometry has been found to be appropriate.

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