Integrated Temperature Sensors for On-Line Thermal Monitoring of Microelectronic Structures

Author(s):  
Karim Arabi ◽  
Bozena Kaminska
1997 ◽  
Vol 5 (3) ◽  
pp. 270-276 ◽  
Author(s):  
V. Szekely ◽  
C. Marta ◽  
Z. Kohari ◽  
M. Rencz

2007 ◽  
Vol 359-360 ◽  
pp. 219-223
Author(s):  
Li Ming Xu ◽  
Lun Shi ◽  
Xiao Ming Zhao ◽  
De Jin Hu

Spindle thermal deformation is the main error source of many precision profile grinders. In this paper, the relationship between spindle temperature and either radial or axial thermal deformation is studied based on experiments. The placement and amount of temperature sensors are optimized. Then a kind of thermal error modeling method based on support vector machine is presented and applied in the modeling of thermal error of profile grinding. The result shows the model is robust and the on-line accurate prediction of grinding thermal error is realized based on monitoring of temperature rise of spindle. Finally, the error compensation strategy is discussed for further application of thermal error modeling.


Sensors ◽  
2019 ◽  
Vol 19 (21) ◽  
pp. 4694 ◽  
Author(s):  
Zhenjun Li ◽  
Zechen Lu ◽  
Chunyu Zhao ◽  
Fangchen Liu ◽  
Ye Chen

In view of the time-varying complexity of the heat source for the ball screw feed system, this paper proposes an adaptive inverse problem-solving method to estimate the time-varying heat source and temperature field of the feed system under working conditions. The feed system includes multiple heat sources, and the rapid change of the moving heat source increases the difficulty of its identification. This paper attempts to develop a numerical calculation method for identifying the heat source by combining the experiment with the optimization algorithm. Firstly, based on the theory of heat transfer, a new dynamic thermal network model was proposed. The temperature data signal and the position signal of the moving nut captured by the sensors are used as input to optimize the solution of the time-varying heat source. Then, based on the data obtained from the experiment, finite element software parametric programming was used to optimize the estimate of the heat source, and the results of the two heat source prediction methods are compared and verified. The other measured temperature points obtained by the experiment were used to compare and verify the inverse method of this numerical calculation, which illustrates the reliability and advantages of the dynamic thermal network combined with the genetic algorithm for the inverse method. The method based on the on-line monitoring of temperature sensors proposed in this paper has a strong application value for heat source and temperature field estimation of complex mechanical structures.


2013 ◽  
Vol 2 (1) ◽  
pp. 119-124
Author(s):  
Zhen Wang ◽  
Min Cao ◽  
Da-Da Wang ◽  
Shao Quan Zhang ◽  
Chuan Li ◽  
...  
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