Growth and Crystallization Mechanism of Microcrystalline Silicon Films Produced by Reactive RF Sputtering

1985 ◽  
pp. 93-105 ◽  
Author(s):  
T. D. Moustakas
Keyword(s):  
Rf Sputtering ◽  
Crystallization Mechanism ◽  
Silicon Films ◽  
Microcrystalline Silicon

Structural Studies of Microcrystalline Silicon Films Produced by Sputtering

1984 ◽  
Vol 38 ◽  
Author(s):  
T. D. Moustakas ◽  
D. A. Weitz ◽  
E. B. Prestridge ◽  
R. Friedman
Keyword(s):  
Film Growth ◽  
Solid Phase ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Solid Phase Crystallization ◽  
Columnar Growth ◽  
X Ray Scattering ◽  
Degree Of Crystallization ◽  
Degree Of Order

AbstractA number of microcrystalline silicon films have been deposited by RF sputtering and their structure was investigated by Raman spectroscopy, X-ray scattering, SEM, TEM and IR spectroscopy. The interpretation of these results suggests that the film growth proceeds initially via amorphous island formation and that the degree of crystallization of the final film depends on subsequent solid phase crystallization during the time of growth. The size and the preferred orientation of the crystallites correlates with the columnar growth habit of the films while the rest of the amorphous matrix is shown to exhibit a considerable degree of order.

Microcrystalline Silicon Films Deposited by Cathode‐Type RF Glow Discharge Technique

1995 ◽  
Vol 142 (5) ◽  
pp. 1663-1666 ◽  
Author(s):  
Ahalapitiya Hewage Jayatissa ◽  
Yoichiro Nakanishi ◽  
Yosinori Hatanaka
Keyword(s):  
Glow Discharge ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Rf Glow Discharge

Preparation and properties of microcrystalline silicon films using photochemical vapor deposition

1983 ◽  
Vol 59-60 ◽  
pp. 715-718 ◽  
Author(s):  
Tadashi Saitoh ◽  
Toshikazu Shimada ◽  
Masataka Migitaka ◽  
Yasuo Tarui
Keyword(s):  
Vapor Deposition ◽  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Photochemical Vapor Deposition

STM on doped and undoped hydrogenated amorphous and microcrystalline silicon films

1992 ◽  
Vol 42-44 ◽  
pp. 1398-1402 ◽  
Author(s):  
W. Zimmermann-Edling ◽  
R. Wiesendanger ◽  
F. Finger ◽  
K. Prasad ◽  
A. Shah
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon ◽  
Hydrogenated Amorphous

Study of metastabilities in microcrystalline silicon films by photoconductivity techniques

2006 ◽  
Vol 501 (1-2) ◽  
pp. 129-132 ◽  
Author(s):  
N. Souffi ◽  
G.H. Bauer ◽  
R. Brüggemann
Keyword(s):  
Silicon Films ◽  
Microcrystalline Silicon
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