Design and Characterization of a Micro-opto-mechanical Displacement Sensor

This paper describes a measurement method for the quality control of cylinders for printing machines based on roll-to-roll presses. If the surface finishing of the cylinders is not adequate, the printing is unacceptable, and the defective cylinders must be reworked. The performed quality check of the cylinder surface roughness by means of contact methods was unable to identify the cylinder defects, and acceptance of the manufactured cylinders before integration was demanded to the visual inspection performed by trained operators. In this work a contactless measurement method based on the eddy current displacement sensor was proposed and validated as a tool for quality check as an alternative to optical roughness measurements. A test bench for the characterization of printer cylinders was designed and manufactured, allowing for the validation of the proposed method on different batches of cylinders and the identification of a threshold to guide the acceptance of tested cylinders prior to mounting on the roll-to-roll press.

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A silicon integrated opto-electro-mechanical displacement sensor

Sensors and Actuators A Physical ◽

10.1016/j.sna.2003.10.067 ◽

2004 ◽

Vol 110 (1-3) ◽

pp. 294-300 ◽

Cited By ~ 19

Author(s):

S. Fourment ◽

P. Arguel ◽

J.-L. Noullet ◽

F. Lozes ◽

S. Bonnefont ◽

...

Keyword(s):

Displacement Sensor ◽

Mechanical Displacement

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Design and Characterization of a Birefringent-Type Compact Displacement Sensor for Improving Measurement Sensitivity by a Guided-Wave Beam

Applied Sciences ◽

10.3390/app7111167 ◽

2017 ◽

Vol 7 (11) ◽

pp. 1167

Author(s):

Ruey-Ching Twu ◽

Nian-Yang Yan

Keyword(s):

Wave Beam ◽

Guided Wave ◽

Displacement Sensor ◽

Measurement Sensitivity

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Design and Characterization of Nano-Displacement Sensor with High-Frequency Oscillators

Journal of Sensors ◽

10.1155/2011/360173 ◽

2011 ◽

Vol 2011 ◽

pp. 1-5 ◽

Cited By ~ 5

Author(s):

Akio Kitagawa

Keyword(s):

High Frequency ◽

Oscillation Frequency ◽

Target Object ◽

Ring Oscillator ◽

Displacement Sensor ◽

Sensor Electrode ◽

Free Running

The circuitry of a capacitive nanometer displacement sensor using the ring oscillator has been analyzed and characterized. We focus on the sensitivity of the sensor to detect the nanometer displacement or strain. The displaced target object must be conductive and the medium around the target object must be an insulator or a vacuum. The sensitivity in the range ofL< 1 μm is enhanced with decreases in the size of the sensor electrode, and using a higher free-running oscillation frequency can increase sensitivity. The proposed sensor, which converts the displacement of the target object to the oscillation frequency, was fabricated with CMOS 350 nm technology, and the sensitivity was estimated at 8.16 kHz/nm. The results of our study indicated that the presented sensor has enough sensitivity to detect the nanometer displacement of the target object at a distance within 1 μm from the surface of the sensor electrode.

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