Simulation Analysis of Error Separation Precision of Three-Probe Method

Author(s):  
Lei Zhang ◽  
Rui Ma ◽  
Dianqing Yu ◽  
Jun Cheng
Author(s):  
Dong-Hyeok Lee ◽  
Wi-Ro Lee

In this study, a real-time measurement system to easily apply multi-probe error separation method for error motion measurement of a shaft was designed and developed. An arrangement condition of sensing probes for accurate multi-probe error separation method was examined and verified by a simulation test. By following the examined arrangement condition for multi-probe method, a measurement system to measure radial and tilt error motions of a shaft was designed and developed. The efficiency of the multi-probe method with the examined arrangement condition was checked by comparing the error motion results for a rotary stage with the error motions in the specifications of the guarantee. It is expected to apply this system to a real-time monitoring system of failure diagnosis for rotating shafts in ships and plants.


Author(s):  
Sang-Woo Baek ◽  
In-Oh Hwang ◽  
Nahm-Gyoo Cho

Herein, a precision measurement method is proposed to evaluate the radial, axial, and tilt error motions of rotating devices such as precision spindles. To improve the accuracy of the estimated multiple-degree-of-freedom error motion components, form error signals in the runout signals are separated and precompensated for before the calculation of the five-degrees-of-freedom error motion components. Fourier model-based multi probe error separation (MPES) techniques, which can prevent the occurrence of harmonic distortions, are applied to separate the form error signals. A three-probe method is applied to layers on the side surface of the cylindrical artifact, and a modified two-probe method is developed and applied to the upper surface. The radial, tilt, and axial error motions are calculated using the runout signals that do not contain the separated form error signals. The measurement system uses eight capacitive probes to detect the runout signals of the cylindrical artifact mounted at the center of the rotating device. To compare the proposed method with the five-probe-based conventional measuring method, an evaluation test simulation is conducted repeatedly five times. Results indicate that the proposed MPES method calculated the uncertainty using the deviation between the computed results from the existing and novel methods; additionally, the input signal in terms of the radial, tilt (layers 1 and 2), and axial error motions are [Formula: see text], [Formula: see text], [Formula: see text], and [Formula: see text], respectively. It is confirmed that the undesirable effects of the form error signals are successfully removed and that the accuracies of the measured spindle error motion components improve.


2008 ◽  
Vol 53-54 ◽  
pp. 421-427 ◽  
Author(s):  
Lei Zhang ◽  
Xiu Min Yang ◽  
Lin Ba ◽  
Yu Zhang

The measuring precision of error separation technology is directly related to error separation parameters selection. If the parameter selection rules aren’t followed correctly, the accuracy of error separation will be affected badly, and even the error figure got will be a distortion result. Through a discussion on the characters of error separation technology, eight rules for choosing error separation parameters of multi-probe method are made in this paper. These rules are regarded as the general laws to follow when measuring the geometrical error by multi-probe method. Based on the results of the online measurement experiment, the parameter selection rules are proved to be effective.


2007 ◽  
Vol 24-25 ◽  
pp. 315-320
Author(s):  
Lei Zhang ◽  
Yu Zhang ◽  
Lin Ba

There are some applications of error separation technique in actual measurement. However there exists a series of theoretical and technical obstacles, and the error separation technique lacks the objective assessment. The further discussion about the character of error separation technique by multi-probe method is made in this paper and six criteria for precision measurement of error separation technique by multi-probe method is also advanced. That is, (1) The criterion for veracity of error separation; (2) The criterion for periodicity of combination signal; (3) The criterion for the remnant first-harmonic in combination signal; (4) The criterion for validity of error separation results; (5) The criterion for validity of probes’ fixing angles ; (6) The criterion for nonzero character of weight function. These criteria are significant for the objective evaluation of the measuring apparatus’ measurement precision, the validity of the sampling data, and the confidence level of error separation results. The validity of the measuring condition was proved by the online measurement experiment.


2012 ◽  
Author(s):  
Anand S. Relkar ◽  
K. N. Nandurkar
Keyword(s):  

2020 ◽  
Vol 90 (3) ◽  
pp. 30502
Author(s):  
Alessandro Fantoni ◽  
João Costa ◽  
Paulo Lourenço ◽  
Manuela Vieira

Amorphous silicon PECVD photonic integrated devices are promising candidates for low cost sensing applications. This manuscript reports a simulation analysis about the impact on the overall efficiency caused by the lithography imperfections in the deposition process. The tolerance to the fabrication defects of a photonic sensor based on surface plasmonic resonance is analysed. The simulations are performed with FDTD and BPM algorithms. The device is a plasmonic interferometer composed by an a-Si:H waveguide covered by a thin gold layer. The sensing analysis is performed by equally splitting the input light into two arms, allowing the sensor to be calibrated by its reference arm. Two different 1 × 2 power splitter configurations are presented: a directional coupler and a multimode interference splitter. The waveguide sidewall roughness is considered as the major negative effect caused by deposition imperfections. The simulation results show that plasmonic effects can be excited in the interferometric waveguide structure, allowing a sensing device with enough sensitivity to support the functioning of a bio sensor for high throughput screening. In addition, the good tolerance to the waveguide wall roughness, points out the PECVD deposition technique as reliable method for the overall sensor system to be produced in a low-cost system. The large area deposition of photonics structures, allowed by the PECVD method, can be explored to design a multiplexed system for analysis of multiple biomarkers to further increase the tolerance to fabrication defects.


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