A Piezoresistive Low-Pressure Sensor Fabricated Using Silicon-on-Insulator (SOI) for Harsh Environment Applications

2001 ◽  
pp. 482-485 ◽  
Author(s):  
Jochen von Berg ◽  
Marco Gnielka ◽  
Claudio Cavalloni ◽  
Thomas Boltshauser ◽  
Thomas Diepold ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Low Pressure ◽  
Silicon On Insulator ◽  
Harsh Environment

scholarly journals High-Resolution Fibre Bragg Grating (FBG) Pressure Transducer for Low-Pressure Detection

2019 ◽  
Vol 16 (2) ◽  
pp. 6783-6795
Author(s):  
Z. M. Hafizi ◽  
E. Vorathin ◽  
A. M. Aizuddin ◽  
K. S. Lim
Keyword(s):  
High Resolution ◽  
Temperature Effect ◽  
Pressure Sensor ◽  
Pressure Measurement ◽  
Temperature Compensation ◽  
Pressure Transducer ◽  
Low Pressure ◽  
Bragg Grating ◽  
Harsh Environment ◽  
Fibre Bragg Grating

Fibre Bragg grating (FBG) pressure sensor has shown great potential in replacing the conventional electrical pressure sensor due to its adaptability to the harsh environment. However, increasing its resolution for low-pressure measurement is still a challenge. In this work, the bonding of FBG to a rubber-based diaphragm pressure transducer was proposed. The proposed pressure transducer had enhanced the sensitivity to 117.7 pm/kPa across the range of 40 kPa, which corresponded to the pressure resolution of 0.008 kPa. Furthermore, the proposed pressure transducer possessed a reference FBG for temperature compensation, where the overall temperature effect was less than 1%.       

The warm-up and offset stability of a low-pressure piezoresistive ceramic pressure sensor

2010 ◽  
Vol 158 (2) ◽  
pp. 198-206 ◽  
Author(s):  
Marina Santo Zarnik ◽  
Darko Belavic ◽  
Srecko Macek
Keyword(s):  
Pressure Sensor ◽  
Low Pressure ◽  
Warm Up

Wireless LTCC-based capacitive pressure sensor for harsh environment

2013 ◽  
Vol 197 ◽  
pp. 30-37 ◽  
Author(s):  
Jijun Xiong ◽  
Ying Li ◽  
Yingping Hong ◽  
Binzhen Zhang ◽  
Tianhong Cui ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Harsh Environment ◽  
Capacitive Pressure Sensor

scholarly journals Low pressure sensor using semiconductor laser

2006 ◽  
Vol 18 (3) ◽  
pp. 168-183
Author(s):  
Ifan Karomi ◽  
Layth Jasim ◽  
Abdul Ghafoor Abdullah
Keyword(s):  
Semiconductor Laser ◽  
Pressure Sensor ◽  
Low Pressure

Stability of a Piezoresistive Ceramic Pressure Sensor Made With LTCC Technology

2012 ◽  
Vol 2012 (CICMT) ◽  
pp. 000371-000376 ◽  
Author(s):  
Marina Santo Zarnik ◽  
Darko Belavic
Keyword(s):  
Pressure Sensor ◽  
Fatigue Testing ◽  
Low Pressure ◽  
Fatigue Tests ◽  
Point Of View ◽  
Long Term Stability ◽  
Pressure Cycling ◽  
Key Characteristics ◽  
The Stability

This paper discusses the stability of a piezoresistive, LTCC-based, pressure sensor that was designed for measurements in a low-pressure range below 100 mbar. The intrinsic stability of the sensor's offset was evaluated at a constant ambient temperature and different conditions regarding the atmospheric humidity. The sensors were also subjected to functional fatigue tests, which included a full-scale and an overload pressure cycling. The results of the fatigue testing revealed the vulnerability of the sensor's structure from the point of view of the long-term stability and the life-cycle. Nevertheless, the stability of the key characteristics of the prototype sensors was found to be satisfactory for accurate measurements in the low-pressure ranges.

Sensitivity Optimization of MEMS Based Piezoresistive Pressure Sensor for Harsh Environment

Silicon ◽  
2020 ◽  
Vol 12 (11) ◽  
pp. 2663-2671 ◽  
Author(s):  
Priyanshu Verma ◽  
Deepak Punetha ◽  
Saurabh Kumar Pandey
Keyword(s):  
Pressure Sensor ◽  
Harsh Environment ◽  
Piezoresistive Pressure Sensor
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