Design of an ultra-low pressure sensor based on the growth of graphene on silicon dioxide surface

Author(s):  
Quochung Tran ◽  
Chengchen Gao ◽  
Yilong Hao
1993 ◽  
Vol 5 (12) ◽  
pp. 1710-1714 ◽  
Author(s):  
R. A. Levy ◽  
J. M. Grow ◽  
G. S. Chakravarthy

2010 ◽  
Vol 158 (2) ◽  
pp. 198-206 ◽  
Author(s):  
Marina Santo Zarnik ◽  
Darko Belavic ◽  
Srecko Macek
Keyword(s):  

2006 ◽  
Vol 18 (3) ◽  
pp. 168-183
Author(s):  
Ifan Karomi ◽  
Layth Jasim ◽  
Abdul Ghafoor Abdullah

2001 ◽  
pp. 482-485 ◽  
Author(s):  
Jochen von Berg ◽  
Marco Gnielka ◽  
Claudio Cavalloni ◽  
Thomas Boltshauser ◽  
Thomas Diepold ◽  
...  

2012 ◽  
Vol 2012 (CICMT) ◽  
pp. 000371-000376 ◽  
Author(s):  
Marina Santo Zarnik ◽  
Darko Belavic

This paper discusses the stability of a piezoresistive, LTCC-based, pressure sensor that was designed for measurements in a low-pressure range below 100 mbar. The intrinsic stability of the sensor's offset was evaluated at a constant ambient temperature and different conditions regarding the atmospheric humidity. The sensors were also subjected to functional fatigue tests, which included a full-scale and an overload pressure cycling. The results of the fatigue testing revealed the vulnerability of the sensor's structure from the point of view of the long-term stability and the life-cycle. Nevertheless, the stability of the key characteristics of the prototype sensors was found to be satisfactory for accurate measurements in the low-pressure ranges.


Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1103
Author(s):  
Jae Sang Heo ◽  
Keon Woo Lee ◽  
Jun Ho Lee ◽  
Seung Beom Shin ◽  
Jeong Wan Jo ◽  
...  

Among various wearable health-monitoring electronics, electronic textiles (e-textiles) have been considered as an appropriate alternative for a convenient self-diagnosis approach. However, for the realization of the wearable e-textiles capable of detecting subtle human physiological signals, the low-sensing performances still remain as a challenge. In this study, a fiber transistor-type ultra-sensitive pressure sensor (FTPS) with a new architecture that is thread-like suspended dry-spun carbon nanotube (CNT) fiber source (S)/drain (D) electrodes is proposed as the first proof of concept for the detection of very low-pressure stimuli. As a result, the pressure sensor shows an ultra-high sensitivity of ~3050 Pa−1 and a response/recovery time of 258/114 ms in the very low-pressure range of <300 Pa as the fiber transistor was operated in the linear region (VDS = −0.1 V). Also, it was observed that the pressure-sensing characteristics are highly dependent on the contact pressure between the top CNT fiber S/D electrodes and the single-walled carbon nanotubes (SWCNTs) channel layer due to the air-gap made by the suspended S/D electrode fibers on the channel layers of fiber transistors. Furthermore, due to their remarkable sensitivity in the low-pressure range, an acoustic wave that has a very tiny pressure could be detected using the FTPS.


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