Effect of thermal cycling on stresses in thin silicon nitride and silicon carbide films

Journal of Materials Science Letters ◽

10.1007/bf00241161 ◽

1996 ◽

Vol 15 (24) ◽

Author(s):

C.W. Lim ◽

C.C. Toh ◽

J.K. Fu ◽

K. Lahiri

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Thermal Cycling ◽

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Ultra-thin silicon nitride barrier implementation for Si nano-crystals embedded in amorphous silicon carbide matrix with hybrid superlattice structure

EPL (Europhysics Letters) ◽

10.1209/0295-5075/95/67006 ◽

2011 ◽

Vol 95 (6) ◽

pp. 67006 ◽

Author(s):

Z. Wan ◽

R. Patterson ◽

S. Huang ◽

M. Green ◽

G. Conibeer

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Amorphous Silicon ◽

Amorphous Silicon Carbide ◽

Superlattice Structure ◽

Carbide Matrix ◽

Silicon Carbide Matrix ◽

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POSSIBILITY OF COMPOSITE SILICON NITRIDE + SILICON CARBIDE (Si3 N4SiC) POWDER PRODUCTION IN THERMAL PLASMA

High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes) ◽

10.1615/hightempmatproc.v15.i4.90 ◽

2011 ◽

Vol 15 (4) ◽

pp. 321-328 ◽

Author(s):

Zivota G. Kostic ◽

Predrag Lj. Stefanovic ◽

Pavle B. Pavlovic ◽

Dejan B. Cvetinovic

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Thermal Plasma ◽

Powder Production ◽

Composite Silicon

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ChemInform Abstract: VERY THIN SILICON NITRIDE FILMS GROWN BY DIRECT THERMAL REACTION WITH NITROGEN

Chemischer Informationsdienst ◽

10.1002/chin.197828033 ◽

1978 ◽

Vol 9 (28) ◽

Author(s):

T. ITO ◽

S. HIJIYA ◽

T. NOZAKI ◽

H. ARAKAWA ◽

M. SHINODA ◽

...

Keyword(s):

Silicon Nitride ◽

Thermal Reaction ◽

Silicon Nitride Films ◽

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Silicon Carbide Formation Enhanced by In-Situ-Formed Silicon Nitride: An Approach to Capture Thermal Energy of CO-Rich Off-Gas Combustion

Metallurgical and Materials Transactions B ◽

10.1007/s11663-018-1413-6 ◽

2018 ◽

Vol 49 (6) ◽

pp. 3151-3163 ◽

Author(s):

S. P. du Preez ◽

J. P. Beukes ◽

P. G. van Zyl ◽

M. Tangstad ◽

L. R. Tiedt

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Thermal Energy ◽

Carbide Formation ◽

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Electromagnetic wave absorption and mechanical properties of silicon carbide fibers reinforced silicon nitride matrix composites

Journal of the European Ceramic Society ◽

10.1016/j.jeurceramsoc.2018.12.038 ◽

2019 ◽

Vol 39 (4) ◽

pp. 743-754 ◽

Author(s):

Ran Mo ◽

Xiaowei Yin ◽

Fang Ye ◽

Xiaofei Liu ◽

Xiaokang Ma ◽

...

Keyword(s):

Mechanical Properties ◽

Silicon Carbide ◽

Electromagnetic Wave ◽

Silicon Nitride ◽

Matrix Composites ◽

Electromagnetic Wave Absorption ◽

Wave Absorption ◽

Silicon Carbide Fibers

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Studies on Abrasive Wear of Monolithic Silicon Nitride and a Silicon Carbide Whisker-Reinforced Silicon Nitride Composite

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.1995.tb08045.x ◽

1995 ◽

Vol 78 (10) ◽

pp. 2705-2708 ◽

Author(s):

Dongfang Wang ◽

Zhiyuan Mao

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Abrasive Wear ◽

Silicon Carbide Whisker

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Thermodynamic analysis of the high-temperature stability of silicon nitride and silicon carbide

Ceramics International ◽

10.1016/0272-8842(85)90059-8 ◽

1985 ◽

Vol 11 (4) ◽

pp. 128 ◽

Author(s):

S.C. Singhal

Keyword(s):

Silicon Carbide ◽

High Temperature ◽

Silicon Nitride ◽

Thermodynamic Analysis ◽

Temperature Stability ◽

High Temperature Stability

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Spectroscopic Investigation of the Synthesis of Thin Silicon Nitride Films on Silicon Single-Crystal Wafers via Ammonia-Assisted Pyrolysis of Organosilicon Polymers

Chemistry of Materials ◽

10.1021/cm000522d ◽

2001 ◽

Vol 13 (2) ◽

pp. 655-661 ◽

Author(s):

Mihai Scarlete ◽

Nancy McCourt ◽

Ian S. Butler ◽

John F. Harrod

Keyword(s):

Silicon Nitride ◽

Single Crystal ◽

Spectroscopic Investigation ◽

Silicon Single Crystal ◽

Silicon Nitride Films ◽

Thin Silicon ◽

Organosilicon Polymers

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Comparison of the Surface Charge Behavior of Commercial Silicon Nitride and Silicon Carbide Powders

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.1988.tb05796.x ◽

1988 ◽

Vol 71 (12) ◽

pp. 1086-1093 ◽

Author(s):

PAMELA K. WHITMAN ◽

DONALD L. FEKE

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

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Sintered silicon nitride/nano-silicon carbide materials based on preceramic polymers and ceramic powder

Journal of the European Ceramic Society ◽

10.1016/j.jeurceramsoc.2011.09.007 ◽

2012 ◽

Vol 32 (9) ◽

pp. 1893-1899 ◽

Author(s):

Ulrich Degenhardt ◽

Frank Stegner ◽

Christian Liebscher ◽

Uwe Glatzel ◽

Karl Berroth ◽

...

Keyword(s):

Silicon Carbide ◽

Silicon Nitride ◽

Ceramic Powder ◽

Preceramic Polymers ◽

Nano Silicon ◽

Sintered Silicon

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