Preparation of amorphous Si3N4-C plate by chemical vapour deposition
1987 ◽
Vol 22
(8)
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pp. 2842-2846
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Keyword(s):
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2002 ◽
Vol 82
(1)
◽
pp. 137-165
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1999 ◽
Vol 09
(PR8)
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pp. Pr8-395-Pr8-402
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1999 ◽
Vol 09
(PR8)
◽
pp. Pr8-373-Pr8-380
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2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-189-Pr3-196
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2020 ◽