amorphous si3n4
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72
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2020 ◽
Vol 272
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pp. 118975
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2019 ◽
Vol 112
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pp. 137-141
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2019 ◽
Vol 45
(12)
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pp. 15758-15762
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2018 ◽
Vol 44
(17)
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pp. 22003-22007
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