Improving the accuracy of TIF in bonnet polishing based on Gaussian process regression
2020 ◽
Vol 110
(7-8)
◽
pp. 1941-1953
2018 ◽
2019 ◽
Vol 150
(4)
◽
pp. 041101
◽
Keyword(s):
2021 ◽
Vol 15
(1)
◽
pp. 1147-1158