Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer
2019 ◽
Vol 25
(9)
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pp. 3521-3532
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2003 ◽
Vol 04
(02)
◽
pp. 385-388
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Keyword(s):
2012 ◽
Vol 21
(04)
◽
pp. 1250028
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