Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams

2006 ◽  
Vol 41 (9) ◽  
pp. 2667-2671 ◽  
Author(s):  
M. Tanaka ◽  
F. Chu ◽  
M. Shimojo ◽  
M. Takeguchi ◽  
K. Mitsuishi ◽  
...  
2012 ◽  
Vol 87 ◽  
pp. 139-141 ◽  
Author(s):  
Kwang-Chon Kim ◽  
Seung Hyub Baek ◽  
Won Chel Choi ◽  
Hyun Jae Kim ◽  
Jin Dong Song ◽  
...  

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