Thermal Stability of Copper-Aluminum Alloy Thin Films for Barrierless Copper Metallization on Silicon Substrate

2017 ◽  
Vol 46 (8) ◽  
pp. 4891-4897 ◽  
Author(s):  
C. P. Wang ◽  
T. Dai ◽  
Y. Lu ◽  
Z. Shi ◽  
J. J. Ruan ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Aluminum Alloy ◽  
Silicon Substrate ◽  
Copper Metallization ◽  
Copper Aluminum ◽  
Thermal Stability Of

scholarly journals The role of the substrate on the mechanical and thermal stability of Pd thin films during hydrogen (de)sorption

2021 ◽  
Vol 46 (5) ◽  
pp. 4137-4153
Author(s):  
Neha Verma ◽  
Rob Delhez ◽  
Niek M. van der Pers ◽  
Frans D. Tichelaar ◽  
Amarante J. Böttger
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Thermal Stability Of

scholarly journals Thermal stability and diffusion characteristics of ultrathin amorphous carbon films grown on crystalline and nitrogenated silicon substrates by filtered cathodic vacuum arc deposition

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Shengxi Wang ◽  
Anurag Roy ◽  
Kyriakos Komvopoulos
Keyword(s):  
Thermal Stability ◽  
Amorphous Carbon ◽  
Silicon Substrate ◽  
Elevated Temperatures ◽  
Carbon Films ◽  
Vacuum Arc ◽  
Cross Sectional ◽  
Prolonged Heating ◽  
Filtered Cathodic Vacuum Arc ◽  
Thermal Stability Of

AbstractAmorphous carbon (a-C) films are widely used as protective overcoats in many technology sectors, principally due to their excellent thermophysical properties and chemical inertness. The growth and thermal stability of sub-5-nm-thick a-C films synthesized by filtered cathodic vacuum arc on pure (crystalline) and nitrogenated (amorphous) silicon substrate surfaces were investigated in this study. Samples of a-C/Si and a-C/SiNx/Si stacks were thermally annealed for various durations and subsequently characterized by high-resolution transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS). The TEM images confirmed the continuity and uniformity of the a-C films and the 5-nm-thick SiNx underlayer formed by silicon nitrogenation using radio-frequency sputtering. The EELS analysis of cross-sectional samples revealed the thermal stability of the a-C films and the efficacy of the SiNx underlayer to prevent carbon migration into the silicon substrate, even after prolonged heating. The obtained results provide insight into the important attributes of an underlayer in heated multilayered media for preventing elemental intermixing with the substrate, while preserving the structural stability of the a-C film at the stack surface. An important contribution of this investigation is the establishment of an experimental framework for accurately assessing the thermal stability and elemental diffusion in layered microstructures exposed to elevated temperatures.

Long-term thermal stability of Equal Channel Angular Pressed 2024 aluminum alloy

2016 ◽  
Vol 677 ◽  
pp. 307-315 ◽  
Author(s):  
Güher Tan ◽  
Y. Eren Kalay ◽  
C. Hakan Gür
Keyword(s):  
Thermal Stability ◽  
Aluminum Alloy ◽  
2024 Aluminum Alloy ◽  
Thermal Stability Of

Effects of nitrogen ion implantation on the thermal stability of tungsten thin films

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
Thermal Stability Of

Thermal stability of TiN thin films investigated by DTG/DTA

2001 ◽  
Vol 141 (1) ◽  
pp. 55-61 ◽  
Author(s):  
Irina G Polyakova ◽  
Thomas Hübert
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Tin Thin Films ◽  
Thermal Stability Of

Thermal stability of plasma deposited thin films of hydrogenated carbon–nitrogen alloys

1999 ◽  
Vol 86 (11) ◽  
pp. 6276-6281 ◽  
Author(s):  
J. V. Anguita ◽  
S. R. P. Silva ◽  
A. P. Burden ◽  
B. J. Sealy ◽  
S. Haq ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Thermal Stability Of

scholarly journals Thermal Stability of Ru–Al Multilayered Thin Films on Inconel 617

Metals ◽  
2018 ◽  
Vol 8 (7) ◽  
pp. 514 ◽  
Author(s):  
Yung-I Chen ◽  
Zhi-Ting Zheng ◽  
Jia-Wei Jhang
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Inconel 617 ◽  
Multilayered Thin Films ◽  
Thermal Stability Of
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