Design, Analysis and Finite Element Modeling of Solidly Mounted Film Bulk Acoustic Resonator for Gas Sensing Applications

2019 ◽  
Vol 49 (2) ◽  
pp. 1503-1511
Author(s):  
Arun K. Johar ◽  
Tarun Varma ◽  
C. Periasamy ◽  
Ajay Agarwal ◽  
D. Boolchandani
Keyword(s):  
Finite Element ◽  
Finite Element Modeling ◽  
Gas Sensing ◽  
Acoustic Resonator ◽  
Design Analysis ◽  
Element Modeling ◽  
Sensing Applications ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications

2007 ◽  
Vol 253 (24) ◽  
pp. 9372-9380 ◽  
Author(s):  
Zhi Yan ◽  
Zhitang Song ◽  
Weili Liu ◽  
Hongxuan Ren ◽  
Ning Gu ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Mass Sensing ◽  
Sensing Applications ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk ◽  
Device Properties

Protein-modified shear mode film bulk acoustic resonator for bio-sensing applications

2014 ◽  
Vol 116 (4) ◽  
pp. 1567-1572 ◽  
Author(s):  
Jingjing Wang ◽  
Weihui Liu ◽  
Yan Xu ◽  
Da Chen ◽  
Dehua Li ◽  
...  
Keyword(s):  
Acoustic Resonator ◽  
Shear Mode ◽  
Sensing Applications ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk
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