A Two-Square Shaped Phononic Crystal Strip for Anchor Quality Factor Enhancement in a Length Extensional Mode TPoS Resonator

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

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Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators

Journal of Applied Physics ◽

10.1063/1.3475987 ◽

2010 ◽

Vol 108 (8) ◽

pp. 084505 ◽

Cited By ~ 22

Author(s):

Drew Goettler ◽

Mehmet Su ◽

Zayd Leseman ◽

Yasser Soliman ◽

Roy Olsson ◽

...

Keyword(s):

Quality Factor ◽

Phononic Crystal ◽

Product Limit

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Boosted anchor quality factor of a thin-film aluminum nitride-on-silicon length extensional mode MEMS resonator using phononic crystal strip

Applied Physics A ◽

10.1007/s00339-021-04885-z ◽

2021 ◽

Vol 127 (10) ◽

Author(s):

Thi Dep Ha

Keyword(s):

Thin Film ◽

Aluminum Nitride ◽

Quality Factor ◽

Phononic Crystal ◽

Mems Resonator

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Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators

Micromachines ◽

10.3390/mi9080413 ◽

2018 ◽

Vol 9 (8) ◽

pp. 413 ◽

Cited By ~ 15

Author(s):

Muhammad Siddiqi ◽

Joshua Lee

Keyword(s):

Quality Factor ◽

Phononic Crystal ◽

Center Frequency ◽

Very High Frequency ◽

Mems Resonators ◽

Solid Disk ◽

Cell Topology ◽

Transmission Measurements ◽

Quality Factor Q ◽

Very High

This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode resonator by applying a unique wide acoustic bandgap (ABG) phononic crystal (PnC) at the anchoring boundaries of the resonator. The PnC unit cell topology, based on a solid disk, is characterized by a wide ABG of 120 MHz around a center frequency of 144.7 MHz from the experiments. The resulting wide ABG described in this work allows for greater enhancement in Q compared to previously reported PnC cell topologies characterized by narrower ABGs. The effect of geometrical variations to the proposed PnC cells on their corresponding ABGs are described through simulations and validated by transmission measurements of fabricated delay lines that incorporate these solid disk PnCs. Experiments demonstrate that widening the ABG associated with the PnC described herein provides for higher Q.

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Acoustic radiation-free surface phononic crystal resonator for in-liquid low-noise gravimetric detection

Microsystems & Nanoengineering ◽

10.1038/s41378-020-00236-9 ◽

2021 ◽

Vol 7 (1) ◽

Author(s):

Feng Gao ◽

Amine Bermak ◽

Sarah Benchabane ◽

Laurent Robert ◽

Abdelkrim Khelif

Keyword(s):

Acoustic Wave ◽

Quality Factor ◽

Acoustic Radiation ◽

Phononic Crystal ◽

Low Noise ◽

Frequency Noise ◽

Element Analysis ◽

General Technique ◽

Energy Confinement ◽

Acoustic Wave Resonators

AbstractAcoustic wave resonators are promising candidates for gravimetric biosensing. However, they generally suffer from strong acoustic radiation in liquid, which limits their quality factor and increases their frequency noise. This article presents an acoustic radiation-free gravimetric biosensor based on a locally resonant surface phononic crystal (SPC) consisting of periodic high aspect ratio electrodes to address the above issue. The acoustic wave generated in the SPC is slower than the sound wave in water, hence it prevents acoustic propagation in the fluid and results in energy confinement near the electrode surface. This energy confinement results in a significant quality factor improvement and reduces frequency noise. The proposed SPC resonator is numerically studied by finite element analysis and experimentally implemented by an electroplating-based fabrication process. Experimental results show that the SPC resonator exhibits an in-liquid quality factor 15 times higher than a conventional Rayleigh wave resonator at a similar operating frequency. The proposed radiation suppression method using SPC can also be applied in other types of acoustic wave resonators. Thus, this method can serve as a general technique for boosting the in-liquid quality factor and sensing performance of many acoustic biosensors.

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