Experimental study of electrode materials for use in a cold-cathode oxygen discharge

1983 ◽  
Vol 52 (2-3) ◽  
pp. 299-309 ◽  
Author(s):  
M.G. Dowsett ◽  
E.H.C. Parker
2005 ◽  
Vol 45 (1) ◽  
pp. 5-21 ◽  
Author(s):  
A.-M. Diamy ◽  
J.-C. Legrand ◽  
V. V. Rybkin ◽  
S. A. Smirnov

2018 ◽  
Vol 101 (9-12) ◽  
pp. 2977-2989 ◽  
Author(s):  
Xuezhi Li ◽  
Jianping Zhou ◽  
Yan Xu ◽  
Chenguang Zhu ◽  
Kedian Wang ◽  
...  

2013 ◽  
Vol 41 (10) ◽  
pp. 2781-2785 ◽  
Author(s):  
Kiyoyuki Yambe ◽  
Kazuo Ogura ◽  
Shinji Hasegawa ◽  
Takaki Shinada ◽  
Takayuki Iwasaki ◽  
...  

The Druyvesteyn method of measuring electron energy distributions in low pressure plasmas has been applied to cold-cathode direct current glow discharges in oxygen and nitrogen at pressures in the range 0.010 to 0.050 mm Hg. Two discharge modes occurred in both gases. Mass spectrometer measurements showed that in nitrogen only N 2 + was present but in oxygen the ions O - , O 2 - , O + , O 2 + , were all present. O - and O 2 + concentrations were about equal in magnitude and formed over 90 % of the ions present. Electron energy distributions in the positive column showed three groups in oxygen and nitrogen. The data available from the oxygen discharge are consistent with the lowest energy peak being a manifestation of a large negative ion concentration ( n - / n e = 20).


Fuel ◽  
2020 ◽  
Vol 270 ◽  
pp. 117085 ◽  
Author(s):  
Xiangliang Zhang ◽  
Baiquan Lin ◽  
Yanjun Li

2006 ◽  
Vol 45 (1A) ◽  
pp. 243-246 ◽  
Author(s):  
Takeshi Sakamoto ◽  
Kouichi Naoi ◽  
Haruaki Matsuura ◽  
Hiroshi Akatsuka

Author(s):  
T. Miyokawa ◽  
S. Norioka ◽  
S. Goto

Field emission SEMs (FE-SEMs) are becoming popular due to their high resolution needs. In the field of semiconductor product, it is demanded to use the low accelerating voltage FE-SEM to avoid the electron irradiation damage and the electron charging up on samples. However the accelerating voltage of usual SEM with FE-gun is limited until 1 kV, which is not enough small for the present demands, because the virtual source goes far from the tip in lower accelerating voltages. This virtual source position depends on the shape of the electrostatic lens. So, we investigated several types of electrostatic lenses to be applicable to the lower accelerating voltage. In the result, it is found a field emission gun with a conical anode is effectively applied for a wide range of low accelerating voltages.A field emission gun usually consists of a field emission tip (cold cathode) and the Butler type electrostatic lens.


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