Titanium nitride and titanium aluminum nitride coatings on silica glass, prepared by pyrolysis of a polymeric precursor film

1991 ◽  
Vol 135 (2-3) ◽  
pp. 236-242 ◽  
Author(s):  
Rainer Jaschek ◽  
Christian Rüssel
2000 ◽  
Vol 370 (1-2) ◽  
pp. 268-277 ◽  
Author(s):  
Maria Brogren ◽  
Geoffrey L Harding ◽  
Richard Karmhag ◽  
Carl G Ribbing ◽  
Gunnar A Niklasson ◽  
...  

1997 ◽  
Vol 495 ◽  
Author(s):  
Charles H. Winter ◽  
Peggy J. McKarns ◽  
Joseph T. Scheper

ABSTRACTTitanium nitride and ternary alloys thereof are of significant interest due to their hardness, chemical resistance, and good electrical conductivity. We report the synthesis, structure, and properties of several new precursors to titanium nitride that are based upon hydrazine-derived ligands. Application of these complexes in titanium nitride film depositions is overviewed. Film properties and characterization are presented. We also describe a new process for the preparation of titanium aluminum nitride films, and focus on how the presence of small amounts of aluminum change the properties of the material.


2015 ◽  
Vol 350 ◽  
pp. 6-9 ◽  
Author(s):  
Amina Zouina Ait-Djafer ◽  
Nadia Saoula ◽  
Hamid Aknouche ◽  
Bendiba Guedouar ◽  
Noureddine Madaoui

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