Titanium nitride and titanium aluminum nitride coatings on silica glass, prepared by pyrolysis of a polymeric precursor film
1991 ◽
Vol 135
(2-3)
◽
pp. 236-242
◽
2000 ◽
Vol 370
(1-2)
◽
pp. 268-277
◽
Keyword(s):
2017 ◽
Vol 331
◽
pp. 163-171
◽
2011 ◽
Vol 205
(21-22)
◽
pp. 5014-5020
◽
Keyword(s):
Keyword(s):