titanium nitride film
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Study of titanium nitride film growth by plasma enhanced pulsed laser deposition at different experimental conditions

2021 ◽  
Vol 405 ◽  
pp. 126492
Author(s):  
M. Escalona ◽  
H. Bhuyan ◽  
S. Ibacache ◽  
M.J. Retamal ◽  
P. Saikia ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Pulsed Laser Deposition ◽  
Film Growth ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Nitride Film ◽  
Experimental Conditions ◽  
Titanium Nitride Film

Remote plasma enhanced atomic layer deposition of titanium nitride film using metal organic precursor (C12H23N3Ti) and N2 plasma

2020 ◽  
pp. 148482
Author(s):  
Byunguk Kim ◽  
Namgue Lee ◽  
Junghoon Lee ◽  
Taehun Park ◽  
Hyunwoo Park ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Nitride ◽  
Atomic Layer ◽  
Nitride Film ◽  
Remote Plasma ◽  
Organic Precursor ◽  
Layer Deposition ◽  
Metal Organic ◽  
Titanium Nitride Film ◽  
N2 Plasma

Comparing PVD Titanium Nitride Film Properties and their Effect on Beyond 7 nm EUV Patterning

2020 ◽  
Author(s):  
Scott DeVries ◽  
Ekmini Anuja De Silva ◽  
Donald Canaperi ◽  
Andrew Simon ◽  
Abraham Arceo de la Pena ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Nitride Film ◽  
Film Properties ◽  
Titanium Nitride Film

The influence of crystal structure and the enhancement of mechanical and frictional properties of titanium nitride film by addition of ruthenium

2019 ◽  
Vol 489 ◽  
pp. 247-254 ◽  
Author(s):  
Hongbo Ju ◽  
Ning Ding ◽  
Junhua Xu ◽  
Lihua Yu ◽  
Yaoxiang Geng ◽  
...  
Keyword(s):  
Crystal Structure ◽  
Titanium Nitride ◽  
Nitride Film ◽  
Frictional Properties ◽  
Titanium Nitride Film

Salisbury screen optical color filter with ultra-thin titanium nitride film

2019 ◽  
Vol 58 (24) ◽  
pp. 6700 ◽  
Author(s):  
Yan-Long Meng ◽  
Jun Tan ◽  
Kai Xu ◽  
Jinnan Chen ◽  
Guo-Jun Jin ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Color Filter ◽  
Nitride Film ◽  
Optical Color ◽  
Titanium Nitride Film

Optimization of Titanium Nitride Film for High Power RF MEMS Applications

2019 ◽  
Vol 48 (10) ◽  
pp. 6431-6436 ◽  
Author(s):  
Prem Kumar ◽  
Deepak Bansal ◽  
Anuroop ◽  
Khushbu Mehta ◽  
Amit Kumar ◽  
...  
Keyword(s):  
Titanium Nitride ◽  
High Power ◽  
Rf Mems ◽  
Nitride Film ◽  
Titanium Nitride Film

Modulating phase by metasurfaces with gated ultra-thin TiN films

Nanoscale ◽  
2019 ◽  
Vol 11 (23) ◽  
pp. 11167-11172 ◽  
Author(s):  
Huan Jiang ◽  
Harsha Reddy ◽  
Deesha Shah ◽  
Zhaxylyk A. Kudyshev ◽  
Sajid Choudhury ◽  
...  
Keyword(s):  
Information Processing ◽  
Titanium Nitride ◽  
Phase Modulation ◽  
Carrier Density ◽  
Spectroscopic Imaging ◽  
Nitride Film ◽  
Tin Films ◽  
Tin Film ◽  
Titanium Nitride Film

Deep control over the phase of light is critical to information processing, telecommunication, and spectroscopic imaging. We design an electrically tunable gold strip/TiN film hybrid metasurface with a deep phase modulation of 337°, employing the tunability of carrier density in a 1-nm titanium nitride film.

Optimization of Titanium Nitride Film Synthesis: Correlations Between the Structure / Micro-Hardness and Deposition Conditions

2018 ◽  
Vol 63 (1-2) ◽  
pp. 75-88
Author(s):  
Mariana Pop ◽  
◽  
G. Negrea ◽  
A. Pop ◽  
◽  
...  
Keyword(s):  
Titanium Nitride ◽  
Nitride Film ◽  
Micro Hardness ◽  
Film Synthesis ◽  
Titanium Nitride Film ◽  
Deposition Conditions
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