Removal of native oxide from silicon surfaces of a-SiNx/Si devices using high pressure hydrogen plasma

1993 ◽  
Vol 36 (2) ◽  
pp. 247-249 ◽  
Author(s):  
Achyut Kumar Dutta
Keyword(s):  
High Pressure ◽  
Hydrogen Plasma ◽  
Silicon Surfaces ◽  
Native Oxide ◽  
Pressure Hydrogen

In Situ Spectroscopic Ellipsometry Study of the Oxide Etching and Surface Damaging Processes on Silicon Under Hydrogen Plasma

1999 ◽  
Vol 591 ◽  
Author(s):  
I.M. Vargas ◽  
J.Y. Manso ◽  
J.R. Guzmán ◽  
B.R. Weiner ◽  
G. Morell
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Hydrogen Plasma ◽  
Chemical Vapor ◽  
Surface Damage ◽  
Silicon Surfaces ◽  
Native Oxide ◽  
Native Oxide Layer ◽  
Si Substrates ◽  
Oxide Etching

ABSTRACTWe employed in situ ellipsometry in the monitoring of surface damage to monocrystalline silicon (Si) substrates under hydrogen plasma conditions. These measurements were complemented with spectroscopic ellipsometry and Raman spectroscopy, in order to characterize the surface conditions. It was found that heating the Si substrate to 700°C in the presence of molecular hydrogen produces etching of the native oxide layer, which is typically 10 Å thick. When the already hot and bare silicon surface is submitted to hydrogen plasma, it deteriorates very fast, becoming rough and full of voids. Modeling of the spectroscopic ellipsometry data was used to obtain a quantitative physical picture of the surface damage, in terms of roughness layer t ickness and void fraction. The results indicate that by the time a thin film starts to grow on these silicon surfaces, like in the chemical vapor deposition of diamond, the roughness produced by the hydrogen plasma has already determined to a large extent the rough nature of the film to be grown.

Peculiarities of high-pressure hydrogen adsorption on Pt catalyzed Cu-BTC metal–organic framework

2021 ◽  
Vol 23 (7) ◽  
pp. 4277-4286
Author(s):  
S. V. Chuvikov ◽  
E. A. Berdonosova ◽  
A. Krautsou ◽  
J. V. Kostina ◽  
V. V. Minin ◽  
...  
Keyword(s):  
High Pressure ◽  
High Pressures ◽  
Hydrogen Adsorption ◽  
Metal Organic Framework ◽  
Pt Catalyst ◽  
Metal Organic ◽  
Pt Catalyzed ◽  
Pressure Hydrogen ◽  
Organic Framework

Pt-Catalyst plays a key role in hydrogen adsorption by Cu-BTC at high pressures.

Improved Endurance of HfO2-Based Metal- Ferroelectric-Insulator-Silicon Structure by High-Pressure Hydrogen Annealing

2019 ◽  
Vol 40 (7) ◽  
pp. 1092-1095 ◽  
Author(s):  
Seungyeol Oh ◽  
Jeonghwan Song ◽  
In Kyeong Yoo ◽  
Hyunsang Hwang
Keyword(s):  
High Pressure ◽  
Silicon Structure ◽  
Hydrogen Annealing ◽  
Pressure Hydrogen

Effect of High Pressure Gaseous Hydrogen on the Tensile Properties of Four Types of Stainless Steels: Investigation of Materials Properties in High Pressure Gaseous Hydrogen—1

2007 ◽  
Author(s):  
Hideki Nakagawa
Keyword(s):  
High Pressure ◽  
Stainless Steel ◽  
Hydrogen Embrittlement ◽  
Storage System ◽  
Gaseous Hydrogen ◽  
Fuel Cell Vehicle ◽  
Ductility Loss ◽  
Hydrogen Storage System ◽  
Type 316L ◽  
Pressure Hydrogen

Practical application of fuel cell vehicle has started in the world, and high-pressure hydrogen tanks are currently considered to be the mainstream hydrogen storage system for commercially implemented fuel cell vehicle. Application of metallic materials to the components of high-pressure hydrogen storage system: hydrogen tanks, valves, measuring instructions and so on, have been discussed. In this work, tensile properties of four types of stainless steels were evaluated in 45MPa (6527psig) and 75MPa (10878psig) high-pressure gaseous hydrogen at a slow strain rate of 3×10−6 s−1 at ambient temperature. Type 316L (UNS S31603) stainless steel hardly showed ductility loss in gaseous hydrogen, since it had stable austenitic structure. On the other hand, Type 304 (UNS S30400) metastable austenitic stainless steel showed remarkable ductility loss in gaseous hydrogen, which was caused by the hydrogen embrittlement of strain induced martensitic phase. Likewise, Type 205 (UNS S20500) nitrogen-strengthened austenitic stainless steel showed remarkable ductility loss in gaseous hydrogen, though it had stable austenitic structure in the same manner as Type 316L. The ductility loss of Type 205 was due to the hydrogen embrittlement of austenitic phase resulting from the formation of planar dislocation array. Furthermore, Type 329J4L (UNS S31260) duplex stainless steel showed extreme ductility loss in gaseous hydrogen, which was caused by the hydrogen embrittlement of ferritic phase.

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