Improved Endurance of HfO2-Based Metal- Ferroelectric-Insulator-Silicon Structure by High-Pressure Hydrogen Annealing

2019 ◽  
Vol 40 (7) ◽  
pp. 1092-1095 ◽  
Author(s):  
Seungyeol Oh ◽  
Jeonghwan Song ◽  
In Kyeong Yoo ◽  
Hyunsang Hwang
Keyword(s):  
High Pressure ◽  
Silicon Structure ◽  
Hydrogen Annealing ◽  
Pressure Hydrogen

Effects of Annealing Parameters on Epitaxial Graphene on SiC Substrates

2019 ◽  
Vol 954 ◽  
pp. 14-20 ◽  
Author(s):  
Yi Wang ◽  
Yun Li ◽  
Zhi Fei Zhao ◽  
Ping Zhou ◽  
Zhi Jun Yin ◽  
...  
Keyword(s):  
High Pressure ◽  
Graphene Layer ◽  
Annealing Temperature ◽  
Epitaxial Graphene ◽  
Hydrogen Atmosphere ◽  
Free Standing ◽  
Hydrogen Annealing ◽  
Carbon Vapor ◽  
Vapor Partial Pressure ◽  
Pressure Hydrogen

The effects of annealing on epitaxial graphene on SiC substrates with various conditions are investigated. Results show that high pressure hydrogen atmosphere is more effective to decouple the epitaxial graphene from SiC substrate than that of a relative lower pressure process. Besides, the characteristic 2D-peak of graphene in Raman spectra disappeared with an annealing temperature 1000 °C, which means that the epitaxial graphene layer was decomposed in this condition. The study also shows that the decomposition of graphene can be effectively suppressed by increasing carbon vapor partial pressure through introducing ethylene during high pressure hydrogen annealing at 1000 °C. And the epitaxial graphene is successfully transferred to quasi free standing graphene by the annealing with an appropriate flow of ethylene.

Hydrogenated IGZO Thin-Film Transistors Using High-Pressure Hydrogen Annealing

2013 ◽  
Vol 60 (8) ◽  
pp. 2537-2541 ◽  
Author(s):  
Se-I Oh ◽  
Godeuni Choi ◽  
Hyunsang Hwang ◽  
Wu Lu ◽  
Jae-Hyung Jang
Keyword(s):  
Thin Film ◽  
High Pressure ◽  
Thin Film Transistors ◽  
Hydrogen Annealing ◽  
Pressure Hydrogen

Improvement of Mobility on Ultra-thin Body SOI MOSFETs by Use of High Pressure Hydrogen Annealing

2005 ◽  
Author(s):  
Yunik Son ◽  
Md.Shahriar Rahman ◽  
Kiju Im ◽  
Man Chang ◽  
Hokyong Park ◽  
...  
Keyword(s):  
High Pressure ◽  
Thin Body ◽  
Hydrogen Annealing ◽  
Pressure Hydrogen

scholarly journals Contact Resistance Reduction of WS2 FETs Using High-Pressure Hydrogen Annealing

2018 ◽  
Vol 6 ◽  
pp. 164-168 ◽  
Author(s):  
Yun Ji Kim ◽  
Woojin Park ◽  
Jin Ho Yang ◽  
Yonghun Kim ◽  
Byoung Hun Lee
Keyword(s):  
High Pressure ◽  
Contact Resistance ◽  
Hydrogen Annealing ◽  
Resistance Reduction ◽  
Pressure Hydrogen

Effects of High-Pressure Hydrogen Annealing (HPHA) on Reliability Characteristics of RRAM

2016 ◽  
Vol 16 (5) ◽  
pp. 4758-4761
Author(s):  
Jeonghwan Song ◽  
Daeseok Lee ◽  
Jiyong Woo ◽  
Euijun Cha ◽  
Sangheon Lee ◽  
...  
Keyword(s):  
High Pressure ◽  
Hydrogen Annealing ◽  
Reliability Characteristics ◽  
Pressure Hydrogen
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