Chemical vapour deposition of boron carbide from BBr3CH4H2 mixtures in a microwave plasma
Keyword(s):
1993 ◽
Vol 2
(2-4)
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pp. 558-561
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2001 ◽
Vol 142-144
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pp. 314-320
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1995 ◽
Vol 05
(C5)
◽
pp. C5-593-C5-600
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1999 ◽
Vol 120-121
◽
pp. 233-237
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Keyword(s):
1990 ◽
pp. 154-166