In situ observation of the growth process of the InAsGaAs heteroepitaxial system using scanning microprobe reflection high energy electron diffraction-total reflection angle X-ray spectroscopy

1993 ◽  
Vol 228 (1-2) ◽  
pp. 18-22 ◽  
Author(s):  
S. Shimizu ◽  
K. Yamamuro ◽  
K. Fuwa ◽  
H. Yanagida ◽  
H. Yamakawa ◽  
...  
1993 ◽  
Vol 312 ◽  
Author(s):  
A. H. Bensaoula ◽  
A. Freundlich ◽  
A. Bensaoula ◽  
V. Rossignol

AbstractPhosphorus exposed GaAs (100) surfaces during a Chemical Beam Epitaxy growth process are studied using in-situ Reflection High Energy Electron Diffraction and ex-situ High Resolution X-ray Diffraction. It is shown that the phosphorus exposure of a GaAs (100) surface in the 500 – 580 °C temperature range results in the formation of one GaP monolayer.


1991 ◽  
Vol 70 (6) ◽  
pp. 3180-3183 ◽  
Author(s):  
T. Yamazaki ◽  
Y. Suzuki ◽  
T. Katayama ◽  
M. Taninaka ◽  
K. Nakagawa ◽  
...  

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