Stress reduction for hard amorphous hydrogenated carbon thin films deposited by the self-bias method
1995 ◽
Vol 270
(1-2)
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pp. 220-225
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Keyword(s):
The Self
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2018 ◽
Vol 125
(5)
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pp. 731-734
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Keyword(s):
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2001 ◽
Vol 32
(9)
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pp. 783-786
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Keyword(s):
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1996 ◽
2007 ◽
Vol 16
(10)
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pp. 1868-1874
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Keyword(s):
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1999 ◽
Vol 148
(1-4)
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pp. 216-220
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1994 ◽
Vol 33
(Part 1, No. 11)
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pp. 6341-6349
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Keyword(s):